摘要
纳米栅格和台阶等结构的线宽准确测量,是国内外计量领域的研究热点与难点。采用原子力显微镜(AFM)能获得上述结构的三维形貌信息,但其扫描图像却是探针针尖的形貌和被测样品表面的形貌共同作用的结果,这种作用往往导致线宽边缘测量失真。为了更加精确地获得样品的表面形貌特征,首先需要重建探针针尖形貌,进而从得到的扫描图像中尽可能地消除由探针形貌带来的失真影响。基于数学形态学的盲重建理论,利用Matlab对不同形状参数的探针针尖扫描台阶样品表面进行了仿真,评价了探针形状对扫描结果的影响,初步实现了基于真实粗糙测量表面的探针针尖形状重建。
To accurate measure the line widths of nano-grid and step structure is the hottest issues in metrology domain. AFM can be used to obtain the three-dimensional topographic information of the above structure,but the scanned image is the result of the interaction between the shape of the tip and the surface morphology of the sample. This interaction often leads to line width edge measurement distortion. To more accurately obtain the surface topography of the sample,firstly,the shape of the tip needs to be reconstructed,and then the distortion effect brought by the tip topography is eliminated as much as possible from the scanned image. Based on the blind reconstruction theory of mathematical morphology,Matlab was used to simulate the stepped sample surface scanned by different shape parameters of tips,the influences of the probe tip shape on the scanning results were evaluated,and got the initial realization of probe tip shape reconstruction based on measuring rough surface.
作者
施玉书
连笑怡
王艺瑄
黄鹭
董明利
胡晓东
高思田
SHI Yu-shu;LIAN Xiao-yi;WANG Yi-xuan;HUANG Lu;DONG Ming-Li;HU Xiao-dong;GAO Si-tian(State Key Laboratory of Precision Testing Technology and Instruments,Tianjin University,Tianjin 300072,China;National Institute of Metrology,Beijing 100192,China;Instrument Science and Optoelectronic Engineering College,Beijing Information Science and Technology University,Beijing 100192,China)
出处
《计量学报》
CSCD
北大核心
2019年第2期177-182,共6页
Acta Metrologica Sinica
基金
科技部国家重点研发专项(2016YFA0200901)
科技部国家重点研发计划(2016YFF0200602)
北京信息科技大学2017-2018年度"实培计划"
关键词
计量学
线宽测量
纳米台阶
原子力显微镜
针尖形状
盲重建
metrology
line width measurement
nano-step
atomic force microscope
tip shape
blind reconstruction
作者简介
第一作者:施玉书(1982-),男,山西太原人,中国计量科学研究院副研究员,主要从事微纳计量检测及相关基标准的研究工作。Email:shiys@nim.ac.cn;通信作者:高思田(1962-),男,天津人,中国计量科学研究院研究员,主要从事纳米测量、精密仪器测量方面的研究工作。Email:gaost@nim.ac.cn
