摘要
原子力显微镜(AFM)是在微纳尺度观测以及操纵样品的重要工具。与传统的接触模式和轻敲模式AFM相比,非共振轻敲模式AFM因为其控制力精度高并可同步获取多种机械特性等优势得到了广泛的应用。采用基于背景相减和同步算法相结合的方法搭建了一套自制的非共振轻敲模式AFM,并对位置检测电路建立了通用噪声仿真模型,优化了位置检测电路噪声,从而优化了最小可控力的精度,使其最小可控力小于50 pN。接着通过对标准硅材料栅格进行形貌表征验证了系统的成像性能,以及对复合材料的形貌、粘附力、形变等多种力学性质表征,验证了系统及成像方法的有效性。
Atomic force microscopy(AFM) is an important tool for observing and manipulating samples at micro-nanometer scale. Compared with traditional contacting mode and tapping mode AFMs, the non-resonant tapping mode AFM has got wide applications due to its high accuracy control force and the ability to acquire multiple mechanical characteristics simultaneously. In this paper, adopting the method based on combining the background subtraction and synchronization algorithm, a home-built non-resonant tapping mode AFM is built. A general noise simulation model is established for the position detection circuit, the position detection circuit noise is optimized, so that the precision of the minimum controllable force is improved, which makes the minimum controllable force smaller than 50 pN. The morphology characterization of the standard silicon lattice was performed to verify the imaging performance of the system. And the characterization of various mechanical properties of composite materials, such as morphology, adhesion force and deformation was carried out to verify the effectiveness of the system and the imaging method.
作者
闫孝姮
孔繁会
邵永健
李鹏
Yan Xiaoheng;Kong Fanhui;Shao Yongjian;Li Peng(Faculty of Electrical and Control Engineering,Liaoning Technical University,Huludao 125105,China;School of Information and Control Engineering,Shenyang Jianzhu University,Shenyang 110168,China;CAS Key Laboratory of Standardization and Measurement for Nanotechnology,Center for Excellence in Nanoscience of Chinese Academy of Science,National Center for Nanoscience and Technology,Chinese Academy of Sciences,Beijing 100190,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2020年第2期70-77,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(61604048,61327813)项目资助.
关键词
原子力显微镜
非共振轻敲
纳米表征
背景相减算法
atomic force microscopy
non-resonant tapping
nanometer-characterization
background subtraction algorithm
作者简介
闫孝姮,2005年、2008年和2016年于辽宁工程技术大学分别获得学士学位、硕士学位和博士学位,现为辽宁工程技术大学副教授,主要研究方向为磁纳米粒子检测与成像。E-mail:xiaohengyan@163.com;孔繁会,2017年于黑龙江科技大学获得学士学位,现为辽宁工程技术大学硕士研究生,主要研究方向为微弱信号检测。E-mail:fhuikong@163.com;邵永健,2017年于沈阳建筑大学获得学士学位,现为沈阳建筑大学硕士研究生,主要研究方向为四探针原子力显微镜的发展及应用。E-mail:996790676@qq.com;通信作者:李鹏,2009年于四川大学获得学士学位,2015年于中国科学院沈阳自动化研究所获得博士学位。现为国家纳米科学中心助理研究员,主要研究方向为扫描探针刻蚀,多探针扫描探针显微镜及先进扫描探针技术。E-mail:lipeng@nanoctr.cn
