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纳米测量技术的挑战与机遇 被引量:21

Challenges and Opportunities of Nanomeasurement Technology
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摘要 纳米测量技术是纳米科学技术的基础学科之一。纳米科学技术的快速发展,不但给纳米测量技术提出了挑战,同时也给纳米测量技术提供了全新发展的机遇。综述了国内外纳米测量技术发展的现状,重点讨论了纳米材料、纳米电子学和纳米生物学等领域所涉及的纳米测量与性能表征的难题和挑战,论述了纳米科技成果给纳米测量技术带来的发展机遇,最后对纳米测量技术的发展方向做了展望。 Nanomeasurement technology is one of the fundamental disciplines of nanotechnology. The rapid development of nanotechnology not only brings challenges but also offers new opportunities to nanomeasurement technology. The latest progress on nanomeasurement technology is reviewed; some difficulties and challenges of nanomeasurement and property characterization faced in the fields of nanomaterial, nanoelectronics and nanobiology are discussed in detail; and some opportunities of nanomeasurement technology offered by the achievements in nanotechnology are briefly introduced. Finally, the future research areas and developing directions in nanomeasurement technology are presented.
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2005年第5期547-550,共4页 Chinese Journal of Scientific Instrument
基金 国家自然科学基金(50275138)资助项目。
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参考文献15

  • 1G. Binnig, H. Rohrer, et al.. Surface studies by scan-ning tunneling microscopy. Phys. Rev. Lett.1982,49(1):57-61.
  • 2白春礼.纳米科技及其发展前景[J].微纳电子技术,2002,39(1):2-5. 被引量:16
  • 3S. Alexander,L. Hellemans,et al.An atomic-resolution atomic-force microscope implemented using an optical lever. J. Appl. Phys. ,1989,65(1):164-167.
  • 4E. Teague. The National Institute of Standards and Technology molecular measuring machine project. J.Vac. Technol. B7,1989,1898-1902.
  • 5A.Franks.Nanometric surface metrology at the national physical laboratory. Metrologia.1992,28(6):471-482.
  • 6D G Chetwynd, N O Krylova, S T Smith. Metrological x-ray interferometry in the micrometre region.Nanotechnology, 1996,7(1) :1-12.
  • 7H Kunzmanm.Nanometrology at PTB.Metrologia.1992,28(6):443-454.
  • 8B. Y. Chen, X. H. Cheng, D. C. Li. Dual wavelength interferometric technique with subnanometric resolu-tion. Applied Optics, 2002,41 (28):5933-5937.
  • 9张亦奕,贺节,商广义,姚骏恩.原子力显微镜[J].光学学报,1995,15(1):112-116. 被引量:8
  • 10徐毅,叶孝佑,李成阳,许婕,高峰.测量微位移的法-珀干涉仪[J].计量学报,1993,14(2):94-98. 被引量:10

二级参考文献38

  • 1姚骏恩,贺节,商广义,艺苑,焦越坎.SSX-1型实用扫描隧道显微镜[J].物理,1989,18(8):486-487. 被引量:3
  • 2干福熹.信息材料[M].天津:天津大学出版社,2001.451.
  • 3滨川圭弘编著 彭军译.半导体器件[M].北京:科学出版社,2002..
  • 4Hou Wenmei,1991年
  • 5许婕,计量学报
  • 6姚骏恩,电子显微学报,1988年,7卷,1期,48页
  • 7Drexler K E.Building molecular machine systems.Trends Biotechnol,1999,17:5~7
  • 8Lowe C R.Nanobiotechnogy:the fabrication and applications of chemical and biological nanostructures.Current Opinion in Chemical Biology,2000,10:428~434
  • 9Merkle R C.Biotechnology as a route to nanotechnology.Trends Biotechnol,1999,17:271~274
  • 10Whitesides G M,Mathias J P,Seto C T.Molecular self assembly and nanochemistry:a chemical strategy for the synthesis of nanostructures.Science,1991,254:1312~1319

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