摘要
针对表面粗糙度接触测量时,触针容易划伤测量表面、易磨损针尖,且不能测量软金属表面,无法实时在线测量,设计研制一台表面粗糙度非接触测量装置。基于LabVIEW平台,采用亚微米级高精度光谱共焦传感器及高精度线性定位运动平台,实现对多种类型加工面的表面粗糙度非接触测量。实验结果表明,该装置测量范围为400μm,最大允许误差±5%,具有一定的应用前景和推广价值。
A non-contact measurement device for surface roughness was developed in order to overcome the shortcomings of contact measurement of surface roughness,such as easy scratch in the measurement surface,easy wear of contact probe,inability to measure soft metal surface and real-time on-line measurement.Based on LabVIEW programming platform,non-contact measurement of surface roughness of various types of machined surfaces was realized by using sub-micron high precision choromatic confocal sensor and high precision linear positioning motion platform.The experimental results proved that the measuring range of the device is 400μm and MPE is±5%.The device has a certain application prospect and promotional value.
作者
陈挺
卢歆
吴春晖
张晓
叶欣
CHEN Ting;LU Xin;WU Chunhui;ZHANG Xiao;YE Xin(Zhejiang Institute of Metrology,Hangzhoug 310018,China)
出处
《中国测试》
CAS
北大核心
2020年第S02期111-114,共4页
China Measurement & Test
基金
浙江省质量技术监督局科研项目(20150216,20180104)
作者简介
陈挺(1982-),男,浙江温岭市人,高级工程师,硕士,主要从事几何量精密测试、光通信计量、虚拟仪器应用于计量测试等科研工作。
