摘要
纳米台阶高度标准物质是一种具有特定量值的物理标准物质,主要用于量值传递以及相关纳米测量仪器的校准。在获批国家标准物质之前,其量值的准确性、稳定性等计量特性必须经过严格的计量测试,才能得到行政许可部门的认可。针对5 nm这一较小量值的纳米台阶高度标准物质的定值方法进行了详细介绍,由中国计量科学研究院自主研制建立的毫米级纳米几何结构计量标准装置采用单一原级的定值方式进行严格定值,采用方差分析法进行均匀性检验,保障了台阶高度量值的溯源性与准确性,定值结果为:h=(5.8±1.0) nm,k=2,并在12个月的时间内进行稳定性监测,最终实现了国家一级标准物质的成功申报。
The nano-step height reference material is a kind of physical reference material with a specific value, which is mainly used for value transmission and calibration of related nanoscale measurement instruments. Before being approved as a national reference material, the metrological characteristics must be calibrated strictly, such as accuracy and stability of the measurement value. In this paper, the characterization method of 5 nm step height reference material is described in detail. The reference material is characterized by millimeter range nano-structure measurement standard device in single primary-level, which is independently developed by National Institute of Metrology, China. It is used to test the homogeneity by the variance analysis method. This measurement process can guarantee the traceability and accuracy of the step height value. The certified values are h =(5.8±1.0) nm and k=2. It is found to be stable at least 12 months. Finally, it has realized the successful declaration of national primary certified reference material.
作者
施玉书
李伟
余茜茜
景蔚萱
胡晓东
Shi Yushu;Li Wei;Yu Xixi;Jing Weixuan;Hu Xiaodong(Tianjin University National Key Laboratory of Precision Testing Techniques and Instrument,Tianjin 300072,China;National Institute of Metrology,Beijing 100029,China;Xi'an Jiaotong University,Xian 710049,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2020年第3期79-86,共8页
Chinese Journal of Scientific Instrument
基金
国家重点研发计划(2018YFF0212302)
中国计量科学研究院科研业务费项目(31-AKY1605)资助
关键词
原子力显微镜
标准物质
台阶高度
溯源性
计量学
atomic force microscopy
reference material
step height
traceability
metrology
作者简介
施玉书,2008年于中国计量大学获得硕士学学位,天津大学在读博士,现为中国计量科学研究院前沿计量科学中心副研究员,主要研究方向为微纳计量技术、精密仪器测量,E-mail:shiys@nim.ac.cn
