摘要
针对Si基微结构气体传感器中Si基与敏感材料之间附着性较差的问题,提出在Si基与敏感材料之间引入纳米孔Al2O3膜形成新型Si基微结构传感器,利用ANSYS分析软件对微结构进行热分析。采用薄膜工艺、光刻工艺、电化学阳极氧化工艺在Si衬底上制成Si基微结构,采用超声波的方法使聚苯胺敏感材料渗入纳米孔Al2O3膜中制成气体传感器,并在室温下测试了传感器对氨气的检测特性。结果表明:将纳米孔Al2O3膜移植到Si基上增加了敏感材料的附着性;传感器对响应时间约为40 s,恢复时间约为960 s,灵敏度随着氨气浓度的增加而增大,并且呈现出良好的线性关系。
Aiming at poor adhesion between Si substrate and sensitive materials in Si substrate microstructure gas sensor,a new Si substrate microstructure gas sensor is put forward by introducing nanoporous Al2 O3 membranes between Si substrate and sensitive materials. The thermal analysis on Si substrate microstructure is made using ANSYS analysis software. A gas sensor is prepared on the Si substrate through a thin film process,a photolithography process and the anodic oxidation process,and the polyaniline sensitive material is permeated into nanoporous Al2 O3 membrane by ultrasonic,and sensitivity characteristics of sensor to ammonia is detected at room temperature. The results show that nanoporous Al2 O3 film is transplanted on Si substrate and increased the adhesion of the sensitive material;the response time is about 40 s,the recovery time is about 960 s,sensitivity increased with the increase of the ammonia concentration and show a good linear relationship.
出处
《传感器与微系统》
CSCD
2015年第8期106-109,共4页
Transducer and Microsystem Technologies
基金
黑龙江省自然科学基金重点资助项目(ZD201217)
黑龙江省自然科学青年基金资助项目(QC2013C059)
黑龙江省教育厅科技资助项目(12541141)
关键词
气体传感器
新型Si基微结构
纳米孔Al2O3膜
聚苯胺
氨气
gas sensor
new Si substrate microstructure
nanoporous A12 03 membrane
polyaniline （PANI）
ammonia （ NH3 ） gas
作者简介
冯侨华（1980-），女，山东栖霞人，工学博士，副教授，从事气体传感器技术研究。
