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等离子体源离子注入表面改性研究及应用 被引量:11

Study and Application on Surface Modification by Plasma Source Ion Implantation
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摘要 采用等离子体源离子注入技术 (PSII)对W18Cr4V高速钢进行了氮离子注入。用俄歇能谱仪对注入层的成分进行了分析。对注入层的显微硬度和耐磨性进行了测试。用扫描电镜对摩擦磨损表面进行了分析。研究结果表明 :氮在注入层呈高斯分布 ,注入层的硬度和耐磨性均明显提高。对等离子体源离子注入技术在航空液压泵配油盘上的应用进行了研究。应用研究结果表明 :经等离子体源离子注入后的配油盘单位行程内回油量的增加量比未注入前下降约 90 % 。 A plasma source ion implantation(PSII) technique was used for implanting nitrogen ions in W18Cr4V high speed steel. The composition of the implanted layer was analysed with Auger electron spectroscopy. The microhardness and wear resistance of the implanted layer were determined. The wearing surfaces were analysed with a scanning electron microscopy. The results of studying showed that the depth profile of content of nitrogen in the implanted layer is like Gaussian distribution, and the microhardness and wear resistance of the implanted layer were raised obviously. The application of plasma source ion implantation technique to the oil distributing disk of aeronautical hydraulic pump was studied. The results of applicable study showed that comparing with the oil distributing disk untreated by PSII, the increment of return oil per unit journey from the oil distributing disk treated by PSII was reduced about 90% the working life of the oil distributing disk was prolonged obviously.
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2002年第1期25-27,共3页 Transactions of Materials and Heat Treatment
基金 中国科学院离子束开放研究实验室基金资助项目(1 0 0 0 2 7)
关键词 等离子体源离子注入 表面改性 高速钢 plasma source ion implantation(PSII) surface modification
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参考文献6

  • 1于加.离子注入——一种有效的表面处理[J].国外金属热处理,1993,14(3):20-26. 被引量:6
  • 2张振信,夏立芳.等离子体源离子注入技术[J].国外金属热处理,1992,13(1):20-23. 被引量:4
  • 3Conrad J R. Plasma source ion implantation:A new, cost - effective, non-line-of-sight technique for ion implantation of materials[ J]. Surface and Coatings Technology, 1988,36(3) :927 ~ 937.
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