摘要
简要回顾了化学气相沉积、离子镀及离子化学热处理等表面改性技术的发展历程,指出了它们的优缺点及技术上的改进;并对近年来新开发的同基合金离子镀进行了扼要推介。
In this paper, the development course of surface modification technologies, such as chemical vapor deposition (CVD), ion plating and ion chemical heat treatment processes are reviewed in brief, the merits and shortcomings and improvements of these technologies are pointed out and a novel ion plating process which has the same of basic component for both deposited layer and substrate is introduced briefly. 〔
出处
《机械管理开发》
2005年第1期30-31,33,共3页
Mechanical Management and Development
关键词
气相沉积
离子表面改性
离子镀
Surface modification Ion surface modification Ion plating
