摘要
激光漂移是影响二维位移测量精度的主要因素之一。为了消除激光光源漂移对二维位移测量结果的影响,提出了一种双光路激光漂移实时补偿的方法。在二维位移测量系统中,根据测量光路结构工作机理建立了激光光源平漂和角漂对位移测量产生误差的模型,通过参考光路监测激光的漂移量,并利用误差模型将漂移量经过转换后补偿到测量结果中。理论分析表明,本文方法能够实现对平漂和角漂的完全补偿。分析了实际光路布置中的结构参数误差对补偿效果的影响,基于此选择光路的结构参数。实验结果显示,使用双路激光漂移补偿方法后,可以使8h内的X方向和Y方向的漂移量分别减少55.1%和73.3%。
Laser drift is the major factor that affects the accuracy of the pr opagating direction of a laser beam, and causes serious errors in 2D displacement measurement.In order to eliminate the influence of laser drift in the 2D displacement measurement system,a method of difference compensation usin g double laser beams is presented.Firstly,the error model for parallel drift and angular drift o f light source is established based on the principle of optical structure in the displacement measurement system.Secon dly,the laser drift is measured by the reference light path which is set up using beam splitter and position det ector,and then it can be converted by drift error model to compensate the displacement measurement.Theoretical analysis shows that this compensation method can totally eliminate the influence of laser drift on mea surement results.On this basis, the influence of structural parameter errors of actual light path on compensatio n results is analyzed and it provides the basis for the selection of structure parameters in the optics measurement sy stem.The experimental results show that using the double laser beams difference compensation method,the X-axis drift reduction and Y-axis drift reduction are respectively 55.1% and 73.3% in 8hours.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2014年第2期299-304,共6页
Journal of Optoelectronics·Laser
基金
国家自然科学基金(51075096)
黑龙江省留学回国人员基金(LC201038/40000045-6-10400-1)资助项目
关键词
激光漂移
角锥棱镜
二维位移测量
位置敏感检测器(PSD)
实时补偿
laser drift
retro-reflector
2D displacement measurement
position sensitive detector （PSD）
real-time compensation
作者简介
E-mail： huangxd@ hit. edu黄向东（1970-），男，黑龙江哈尔滨人，副教授，硕士生导师，主要从事超精密光电传感测量研究．
