摘要
对零件厚度和公差的检测是当前精密制造行业中非常重要的一个环节,其中基于光谱共焦的非接触式测量具有无应力、对被测物影响小和检测速度快等优点,在工业上被广泛应用于零件的厚度检测和公差检测。首先介绍了光谱共焦测距系统的分类和原理,然后基于Y型结构光谱共焦系统进行了设计,使用带有8°楔角接囗的APC(Angled Physical Contact)光纤,模块化地设计了整个光谱共焦系统,色散物镜的测量距离达到了2.1 mm,光谱仪分辨率达到了0.1 nm,采用多项式对测量曲线进行了拟合,理论分辨率达到了0.35μm,并对透镜的可加工性能进行了分析,在保证良好加工性能的同时具有较低的透镜成本,然后对色散物镜和光谱仪进行了公差分析,最后对色散物镜和光谱仪系统进行了结构设计。
Objective In the precision manufacturing industry,the measurement of the thickness and tolerance of small parts is a crucial step.Common measurement methods mainly include contact and non-contact schemes.Contact measurement may cause damage to the measured parts due to contact with the surface,and the contact area can generate stress on the measured parts,potentially causing minor displacements that lead to inaccurate measurement results.Non-contact measurement offers the advantages of not needing to touch the measured parts,fast measurement speed,and flexible integration.Recent advancements in optical technologies have further enhanced the precision and reliability of non-contact methods,making them increasingly viable for industrial applications.Spectral confocal measurement systems are one type of non-contact measurement;therefore,designing a compact,high-precision,low-cost spectral confocal system is essential.Methods By analyzing the components of spectral confocal systems,it was determined that the system to be designed mainly consists of two parts:the dispersive objective lens and the spectrometer,with defined design specifications.The complex and cumbersome entire spectral confocal system was divided into three subsystems using the concept of modular design.This approach not only simplifies manufacturing and assembly but also improves system maintainability and scalability.Results and Discussions A hybrid diffractive/refractive spectral confocal system with a wavelength range of 400-800 nm based on APC(Angled Physical Contact)port type Y-fibers was designed,with a working distance of 10 mm and a working range of 2.1 mm.The design of each subsystem reaches or approaches the diffraction limit,and the lens shapes and tolerances are in line with manufacturing processes.The theoretical measurement resolution of the entire system is 350 nm.Conclusions Designed a hybrid diffractive/refractive spectral confocal measurement system with a working distance of 10 mm and a working range of 2.1 mm.Compared to other confocal spectral measurement systems,this design utilizes the concept of modular design to modularize the complex and cumbersome entire ranging system.Furthermore,the hybrid diffractive refractive design effectively corrects chromatic aberrations while maintaining a compact structure,making it suitable for integration into automated production lines.The dispersive objective lens and the spectrometer share the same collimation module,which can be installed in conjunction with other modules,and the structure is unified.Future work will focus on experimental validation and further optimization for industrial deployment.In the optical system design,each system has good manufacturability and the relative cost of lens materials is low.Third-order and linear polynomials were used to fit the chromatic focal shift curves and position curves of the dispersive objective lens and the spectrometer,with minimum residual coefficients of 0.9996 and 0.9999.
作者
黄贺
张斌智
张瀛怀
李鑫
郑仲
HUANG He;ZHANG Binzhi;ZHANG Yinghuai;LI Xin;ZHENG Zhong(Jihua Laboratory,Foshan 528000,China)
出处
《红外与激光工程》
北大核心
2025年第6期196-205,共10页
Infrared and Laser Engineering
基金
国家重点研发计划项目(2021YFB3704300)。
关键词
光谱共焦系统
非接触式
像差优化
光谱仪
spectral confocal system
non-contact
aberration optimization
spectrometer
作者简介
黄贺,男,工程师,主要从事光学先进制造方面的研究;通讯作者:张斌智,男,研究员,博士,主要从事光学先进制造方面的研究。
