摘要
彩色共聚焦技术无需轴向扫描,测量速度快、测量精度高,具有良好的轴向层析能力和轴向分辨能力,在智能制造、生物医学等领域应用广泛。但目前的彩色共聚焦技术多为单点测量,所需横向扫描耗时长,不能满足快速测量的应用需求。本文在单点彩色共聚焦实验平台的基础上,利用光纤束作为光分束器件实现并行色散。同时,利用面阵彩色相机作为光电接收器件,结合颜色转换算法实现"H值-高度"转换。先以自制台阶作为测量对象,确定测量装置的测量范围及精度;再以硬币表面"E"字为测量对象,通过线扫描的方式还原了硬币表面的三维形貌。实验结果表明,该系统的轴向测量范围约80μm,轴向测量精度可达到微米级,系统具有良好的三维重构能力。
The chromatic confocal technique does not need axial scanning,which has high measurement speed,high precision,good axial tomography ability and good axial resolution ability.Therefore,it has been widely used in intelligent manufacturing,biomedicine and other fields.However,the existing chromatic confocal methods mostly depend on the single-point measurement,which needs long horizontal scanning time.It cannot meet the application requirements of rapid measurement.The optical fiber bundle is used as the optical beam splitter,which can produce the parallel dispersion.Meanwhile,the chromatic camera and the color conversion algorithm are applied,which can help collect and process multiple measurement points.In the experiments,a self-built measurement system is constructed to test the measurement range and accuracy.Then,the character"E"on the surface of coin is scanned linearly to test the 3 D reconstruction capability of the system.Experimental results show that the axial measurement range of the system is about 80μm,the axial measurement accuracy can achieve micron level,and the measurement system has good 3 D reconstruction capability.
作者
张雅丽
余卿
程方
王寅
王翀
Zhang Yali;Yu Qing;Cheng Fang;Wang Yin;Weang Chong(College of Mechanical Engineering and Automation,Huaqiao University,Xiamen 361021,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2020年第12期23-31,共9页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金资助项目(52075190,51505162)
福建省杰青基金(2018J06014)
福建省科技计划项目(2019I0013)
华侨大学中青年教师科研提升资助计划项目(ZQN-PY604)资助。
关键词
彩色共聚焦
光纤束
彩色相机
并行测量
三维重构
chromatic confocal measurement
optical fiber bundle
chromatic camera
parallel measurement
3D reconstruction
作者简介
张雅丽,2019年于山东科技大学获得学士学位,现为华侨大学机电及自动化学院精密仪器及机械专业研究生,主要研究方向为光电检测。E-mail:1612737648@qq.com;通信作者:余卿,2005年于合肥工业大学获得学士学位,2011年于合肥工业大学获得博士学位,现为华侨大学副教授,主要研究方向为光电检测、精密机械设计等。E-mail:yuqing@hqu.edu.cn。
