摘要
位移检测技术是几何量精密测量的基础,在当代精密制造领域应用广泛。光谱共焦位移测量技术具有对环境杂散光、被测物倾斜、材料类型不敏感,测量频率高以及分辨率高等优点,可以检测位移量、表面粗糙度、三维形貌以及单层或多层透明材料的厚度,在精密位移测量领域中占据重要地位。近年来,利用衍射光学元件提高光学系统性能的光谱共焦测量技术被广泛研究。文章综述了基于衍射色散原理的光谱共焦位移测量技术的研究进展。首先,介绍了光谱共焦位移测量原理和衍射光学元件的色散特性;其次,阐述了基于衍射色散原理的光谱共焦位移测量技术的发展历史及研究进展;最后展望了该技术的发展趋势。
With the rapid development of precision manufacturing industry,the demand for precision measurement technology is increasing fast.Displacement detection technology is the basis of geometric precision measurement and is widely used in the field of contemporary precision manufacturing.The chromatic confocal displacement measurement system has the advantages of insensitivity to stray light,tilt of the measured object,and materials type,as well as high measuring frequency and high resolution.It can detect displacement,surface roughness,three-dimensional topography and the thickness of single-layer or multi-layer transparent materials.So it plays an significant role in the field of precision displacement measurement.In recent years,the chromatic confocal measurement technology using diffractive optical elements to improve the performance of optical system has been widely studied by domestic and foreign scholars.In this paper,the research progress of chromatic confocal displacement measurement based on diffraction dispersion principle was summarized.Firstly,the principle of chromatic confocal displacement measurement and the characteristics of diffractive optical elements were introduced.Then,the development history and research progress of chromatic confocal displacement measurement technology based on diffractive dispersion principle were described.Finally,the development trend of this technology was prospected.
作者
王玉龙
李杰
侯溪
曹学东
陈林
杨文博
WANG Yulong;LI Jie;HOU Xi;CAO Xuedong;CHEN Lin;YANG Wenbo(University of Chinese Academy of Sciences,Beijing 100049,CHN;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,CHN)
出处
《半导体光电》
CAS
北大核心
2023年第1期1-7,共7页
Semiconductor Optoelectronics
关键词
位移测量
衍射光学元件
光谱共焦传感器
displacement measurement
diffractive optical elements
chromatic confocal sensor
作者简介
通信作者:李杰(1984-),男,安徽省淮南市人,博士,副研究员,硕士生导师,主要从事精密几何量精密测试技术、精密光学测试技术等方面的研究,E-mail:lijie@ioe.ac.cn;王玉龙(1996-),男,四川省成都市人,博士研究生,从事精密几何量精密测试技术等方面的研究
