摘要
胶合滤光棱镜主要是用来让不同波段的光谱或透射或反射以达到在一系列波段中选取所需要辐射波段的目的,其在两光路及以上的综合光电系统改善像质方面应用广泛,但是实际工艺加工中对于大陡度的胶合滤光棱镜膜系由于膜层厚度误差累积效应,经常在陡度附近透射波段出现“塌峰”现象,严重影响胶合滤光棱镜的实际光谱性能。阐述了光学薄膜透射率控制膜层厚度停止点的原理、镀膜机直接光控结构、胶合棱镜与光控片监控波长换算公式,并利用ARES1350镀膜机直接光控系统光控片监控胶合棱镜滤光膜系,提高了膜层厚度的控制精度,修正了膜层厚度的误差累计,达到了所制备膜系在790~825 nm, Ravg≥95%,895~935 nm, Tavg≥95%的滤光技术指标要求,膜层质量满足JB/T 8226.8—1999检测标准,为该类大陡度胶合滤光棱镜陡度附近透射率的控制提供了新的工艺方法。
The glued filter prism was mainly used to make the spectrum transmission or reflection of different wave bands to achieve the purpose of selecting the required radiation wave band from a series of wan bands,which was widely used in improving the image quality of the integrated optoelectronic system with two or more optical paths.However,in the actual processing,the glued filter prism film system with large gradient was due to the cumulative effect of film thickness error.The phenomenon of peak collapse often occurred in the transmission band near the steepness,which seriously affected the actual spectral performance of the glued filter prism.It was described that the principle of optical film transmittance controlling the stop point of film thickness,the direct optical control structure of the coating machine,and the conversion formula of the monitoring wavelength of the gluing prism and the optical controller,at the same times,we used the optical controller of the direct optical control system of the ARES1350 coating machine to monitor the glued prism filter film system,which improved the control accuracy of the film thickness,corrected the error accumulation of the film thickness.The technical specification were achieved including 790~825 nm,Ravg≥95%,895~935 nm,Tavg≥95%.The film quality met JB/T 8226.8—1999 test standard,it provided a new technological method for the control of transmittance near the steepness of this kind of large steepness glued filter prism.
作者
张金豹
史成浡
南勇
谢成荫
崔世俊
ZHANG Jinbao;SHI Chengbo;NAN Yong;XIE Chengyin;CUI Shijun(Henan PingYuan Optics&Electronics Co.,Ltd.,Jiaozuo 454001,China)
出处
《新技术新工艺》
2024年第2期16-20,共5页
New Technology & New Process
关键词
光学薄膜
滤光膜
直接光控
光控片
胶合棱镜
optical thin film
filter film
direct optical control
optical controllers
gluing prisms
作者简介
张金豹(1984-),男,高级工程师,高级技师,主要从事真空光学薄膜工艺技术开发等方面的研究。
