摘要
针对目前膜厚监控技术的广泛使用和其方法的日益多样性 ,力图对光学薄膜膜厚监控方法作一个全面、细致的描述。包括膜厚监控方法的分类、进展和展望 。
Based on recent and extensive application of thin film thickness monitoring,we try to summary the basic techniques and their progress of different monitoring methods.Special emphasis are given on some optical monitoring methods like rapidly developing spectroscopic ellipsometry.
出处
《激光杂志》
CAS
CSCD
北大核心
2004年第4期10-12,共3页
Laser Journal
关键词
光学薄膜
膜厚监控
optical thin film
thickness monitoring
