摘要
针对目前湿度传感器存在抗干扰能力差、分辨率低、响应速度慢等问题,提出一种基于石英音叉与感湿材料结合的湿度检测方法,并根据石英音叉的谐振原理,设计出一种湿度传感器。通过有限元分析得出石英音叉最佳谐振模态的谐振频率;之后将聚乙烯醇(PVA)感湿材料涂覆在石英音叉表面制作湿度传感器。实验结果表明,该传感器在室温20℃、25%~85%相对湿度范围内,灵敏度在-1.17 Hz/%,响应时间在70 s左右,恢复时间在105 s左右,湿滞为1.45%,能够满足工业检测的高精度要求。
Aiming at the humidity sensor has the problems of poor anti⁃interference ability,low resolution and slow response speed in this time,this research find out a humidity testing method that combined quartz tuning fork with moisture sensitive mate⁃rials,and designed a humidity sensor according to the resonance principle of quartz tuning fork.Firstly,resonance frequency of the best resonant mode of quartz tuning fork by finite element analysis,PVA moisture sensing materials were smeared to cover the surface of quartz tuning fork on the next step to make the humidity sensor.The results illustrates that between the humidity range of 25~85%RH,at room temperature 20℃,this humidity sensor can meet the precision requirements of industrial measurement,with the sensitivity of-1.17 Hz/%and the estimated response time and recovery time are 70 s and 105 s respectively,the hyster⁃esis is 1.45%,meeting the high precision requirement of industrial detection.
作者
徐军
杨帆
孙明晓
XU Jun;YANG Fan;SUN Ming-xiao(School of Automation,Harbin University of Science and Technology,Harbin 150080,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2020年第11期5-9,共5页
Instrument Technique and Sensor
基金
黑龙江省普通高校基本科研业务费专项资金资助项目(LGYC2018JC011)。
关键词
湿度传感器
石英音叉
谐振频率
PVA
敏感特性
humidity sensor
quartz tuning fork
resonant frequency
PVA
sensitive characteristics
作者简介
徐军(1968-),教授,博士,主要从事智能传感器领域的研究。E⁃mail:hlgxj@126.com;通讯作者:杨帆(1994-),硕士研究生,主要从事传感器技术与物联网系统的研究。E⁃mail:yf45619@163.com。
