摘要
针对高精度温度测量需求,设计了一种新切型石英音叉谐振式温度敏感元件,通过悬臂梁弯曲振动微分方程理论计算和有限元预应力大形变模态仿真,分析了敏感元件的温频特性.采用石英MEMS加工工艺,研制出石英谐振式温度敏感元件,封装成测试样机,搭建温度测试平台并对原理样机进行性能测试.与理论计算和有限元仿真结果进行比对,可知理论计算和有限元仿真能准确反映出敏感元件的温频特性.在-40~60℃的温度范围内,样机的测试结果为:标称频率为67 377.656 Hz,灵敏度为-0.71 Hz/℃,一阶频率-温度系数为-1.225 1×10^(-5)℃^(-1),重复性为0.022%,迟滞为0.054%.
A resonant temperature sensitive element of quartz tuning fork with a new cut was explored, aiming at the demand of high precision temperature measurement, and the temperature-frequency characteristics of the sensitive element were analyzed with flexural vibration equation and finite element analysis. The sensitive element was developed and fabricated with quartz MEMS technology, whose performance was tested using the temperature calibration system. Experimental results were compared with those of theoretical calculation and finite element analysis, demonstrating that the theoretical and finite element analysis prediction could precisely reveal the temperature-frequency characteristics of the resonant temperature sensor of quartz tuning fork. Experimental results of the prototype within the range of - 40 ℃ to 60 ℃ show that the normal frequency is 67 377. 656 Hz, the sensitivity is -0.71 Hz/℃, the first-order frequency-temperature coefficient is - 1. 225 1×10^-5℃ -j , the repeatability is 0. 022% , and the hysteresis is 0. 054%.
出处
《纳米技术与精密工程》
CAS
CSCD
北大核心
2016年第5期384-389,共6页
Nanotechnology and Precision Engineering
关键词
石英音叉
温频特性
MEMS
有限元分析
quartz tuning fork
temperature-frequency characteristics
MEMS
finite element analysis
作者简介
韩东祥（1990-），男，硕士，助理工程师
通讯作者：邹江波，研究员，zoujiangbo@hotmail．com
