摘要
根据仿生学原理 ,采用分立式布局 ,研制出大行程高分辨率旋转微驱动器。该微驱动器采用电磁铁箝位、压电陶瓷驱动的爬行式步进机构形式 ,实现了光学镜面的二维微调整操作。实验表明 ,该微驱动器具有分辨率高、行程大、步距可变等特点 ,也适用于其它微操作中大行程高分辨率的旋转驱动。
According to biology imitating theory, a large travel and high precision rotary micro driver with discrete layout has been developed. Due to the stepping mechanism with electro magnet anchor/loosen and PZT driving, the micro-driver realizes two degree of freedom micro-displacement of optical mirror. Experiments show that the micro-driver realizes high resolution, large travel and variable step. Apart from optical micro driving, it can also be applied to large travel and high resolution rotary driving among some micro manipulations.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第6期514-518,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目 (5 9785 0 0 2 )
关键词
微操作
微驱动
仿生型旋转微驱动器
电磁铁箝位
压电陶瓷
机器人
micro manipulation
micro driving
bionics imitating rotary micro driver
electro magnet anchor/loosen
piezoelectric elements (PZT)
