摘要
研制了一种压电陶瓷驱动的微步进机构,介绍了步进机构的工作原理,进行了可行性实验,测试了步进机构的步长和动态响应性能,给出了运动速度的近似公式。实验表明,该步进机构能够实现高速度、小步长(纳米至微米级)、大行程的步进运动。
A new micro step motion mechanism driven by piezo element was developed.This paper introduces the principle of the step motion mechanism.Some experiments were carried out to check the feasibility of realizing step motion.The step and dynamic property of the mechanism was measured.An equation was provided to approximately describe the speed of motion.The experiments show that the mechanism can realize large-range step motion,with a comparatively high speed and a nanometer to micrometer order step.
出处
《光学仪器》
2004年第4期26-29,共4页
Optical Instruments
