摘要
电容式陀螺仪是一种振动式陀螺仪,由于加工的特殊性使其具有了传统的陀螺无法比拟的优点,从而拓宽了其应用领域.为了提高陀螺仪的检测精度,本文提出了一种静电梳齿驱动、栅结构的电容式检测的微机械陀螺仪的设计方法,并分析了其工作原理.运用ANSYS软件对陀螺结构进行了仿真和模态分析,仿真结果与理论计算结果相接近.所设计的陀螺结构采用体硅标准工艺方法进行了设计,并对其进行了流片加工和封装,最终得到了电容式微机械陀螺仪.实验测试的结果表明,陀螺驱动模态的固有频率为4.06 kHz,灵敏度为0.027 9 V/((°)s-1).
The capacitive gyroscope is a kind of vibratory gyroscope.Compared with the conventional gyroscope,the gyroscope has many merits because of its artifactitious particularity.The capacitive gyroscope has been widely used in many fields.In order to improve the measurement precision of the gyroscope,a design method of micromachined gyroscope based on comb-drive electrostatic structure and capacitive detection of bar structure was presented in this paper.The operating principle of the micromachined gyroscope was analyzed in detail.The structural simulation and modal analysis of the gyroscope were developed by utilizing ANSYS soft.The simulation results are close to those of the theoretical calculation.The structure was designed and processed by technological processes.After processing and packaging,the gyroscope was tested.Experimental results show that the measured resonant frequency is 4.06 kHz in driving mode,and the sensitivity is 0.027 9 V/（°/s）.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2011年第3期207-211,共5页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(60871041)
山西省创新团队资助项目
关键词
电容式微机械陀螺
栅结构
仿真与设计
capacitive micromachined gyroscope
bar structure
simulation and design
作者简介
谭秋林（1979-），男，博士，讲师 通讯作者：谭秋林，tanqiulin．99@163．com．
