摘要
为了提高硅微机械陀螺仪的检测精度,稳定驱动振动速度的幅度和频率,采用了硅微机械陀螺仪自激驱动方式。该方式能够使驱动振动自动稳定在陀螺仪驱动模态的谐振频率上。同时,采用自动增益控制(AGC)保持恒定的驱动振动幅度。根据自激驱动电路原理和现有的陀螺样品,建立了陀螺仪驱动动力学方程的等效电路模型。设计、制作了自激驱动电路,仿真和实验结果表明该方法切实可行。
In order to improve detection precision and get constant amplitude and frequency of driving oscillation velocity, self-excited driving mode of micromachined gyroscope is presented, which enables driving motion to oscillate stably with resonance frequency of driving mode and to keep steady amplitude of driving oscillation velocity. The AGC circuitry keeps constant amplitude of driving oscillation. Equivalent circuit model of driving dynamics equation is established according to principle of self-excited driving, and self-excited driving circuitry is also designed based on gyro sample. Simulation and experimental results prove it feasible.
出处
《传感技术学报》
EI
CAS
CSCD
北大核心
2006年第2期364-366,370,共4页
Chinese Journal of Sensors and Actuators
关键词
硅微振动陀螺仪
自激驱动
模态
silicon micromachined vibratory gyroscope
self-excited driving
mode
作者简介
王（1981-），男，博士生，研究方向为微系统与测控技术；
王寿荣，男，教授，博士生导师，srwang@seu．edu．cn．
