摘要
采用溶胶-凝胶工艺在普通玻璃片上制备了掺铝氧化锌薄膜。通过X-射线衍射(XRD)、原子力显微镜(AFM)对薄膜的组织结构和形貌进行了表征,结果表明:用溶胶-凝胶法制得的掺铝氧化锌薄膜为纤锌矿型结构,呈c轴方向择优生长,表面均匀、致密。通过紫外-可见透射光谱(UV)和标准四探针法对薄膜的光电性能进行了研究。试验发现,当铝离子掺杂浓度为4%(摩尔分数)、溶胶物质的量浓度为0.6mol/L、前处理温度为300℃时,薄膜在可见光区的透过率超过80%,且具有较好的导电性,电阻率为8.0×10-4Ω.cm。
Al-doped ZnO thin films were fabricated on glass substrates by sol-gel method. Their microstructures and morphologies were studied with X-ray diffraction （ XRD ） and atomic force microscopy （ AFM ）. The results indicate that the thin films by the Sol-Gel method are c-axis orientation, homogeneous and dense surface with the crystalline structure of hexagonal wurtzite. Using the measurement of UV-Vis transmittance spectroscopy and standard four probes method, the electrical and optical properties of Al-doped ZnO thin films were investigated. The experimental data show that their optical transmittance are over 80% in visible region and their favorable electrical conducting has been achieved with resistivity of 8.0 ×10-4Ω.cm derived by Al/Zn ratios of 4.0% ;sol concentration of 0.6mol/L; re-heat treatment at 300℃ ;annealing at 500℃.
出处
《表面技术》
EI
CAS
CSCD
2007年第4期34-36,共3页
Surface Technology
作者简介
韦美琴（1975-），女，安徽安庆人，硕士，从事材料表面工程的研究。
