摘要
激光在片式电阻上的横向切割长度对阻值影响较大 ,合理设计其长度能够以较低成本提高激光调阻精度及调阻效率。通过实验数据分析得出激光横向切割的长度变化率与阻值变化率之间的定量结论 ,并拟合了有效横向切割长度的阻值变化率与切割长度变化率之间的关系函数 ,二者能够为提高调阻精度和调阻效率提供控制依据。
The laser cutting that is vertical to the current flow,called transverse-cutting,increases the resistance quickly.Designing its length reasonably can improve the trimming precision and yield efficiency at a low cost.Through analyzing the experimental data,the quantitative dependence of resistance varying-ratio on cutting-length varying-ratio of transverse-cutting is gotten,and the function of them when cutting-length varying-ratio is less than 55% is fitted.They both can provide the control basis for improving the trimming precision and yield efficiency.
出处
《激光杂志》
CAS
CSCD
北大核心
2005年第1期35-36,共2页
Laser Journal
关键词
激光调阻
横向切割
长度变化率
阻值变化率
laser trimming,transverse cutting,cutting-length varying-ratio,resistance varying-ratio
