摘要
激光在片式电阻上的纵向切割对阻值变化影响较小 ,合理设计其长度可以提高激光调阻精度及保证阻值稳定性。通过电阻细分和实验数据分析得到激光纵向切割长度对阻值影响的定量公式。经实验验证 :该公式的估算偏差不大于 1 % ,能够准确预测经激光纵向切割的电阻阻值的变化趋势和速度 。
The laser-trimming path that is parallel to the current flow, called ordinate cutting, increases the resistance slowly. Designing its length reasonably can improve the trimming precision and resistance stability. Applying resistor-subsection method and experimental data, the dependence of resistance on ordinate cutting length is studied quantitatively and the quantitative formula is fitted. The experimental data validated that the calculating error of fitted formula is less than 1%. It can forecast the trend and speed of resistance varying. It can provide control basis for improving the trimming precision and resistance stability.
出处
《电子器件》
CAS
2004年第3期448-452,共5页
Chinese Journal of Electron Devices
基金
国家高技术产业化光电子专项项目 ( No.2 0 0 2 0 5 5 )
长春市科技攻关计划项目 ( No.0 2 -1 3 0 G2 2 )
2 0 0 3年度中科院研究生科学与社会实践资助专项创新研究类 (人教字【2 0 0 3】66号 )
2 0 0 3年度中科院长春光学精密机械与物理研究所青年创新基金 ( Q0 3
关键词
激光调阻
纵向切割
电阻细分
估算偏差
laser trimming
ordinate cutting
resistor-subsection
calculating error
