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Quantum Boltzmann equation solved by Monte Carlo method for nano-scale semiconductor devices simulation 被引量:5
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作者 杜刚 刘晓彦 韩汝琦 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第1期177-181,共5页
A two-dimensional (2D) full band self-consistent ensemble Monte Carlo (MC) method for solving the quantum Boltzmann equation, including collision broadening and quantum potential corrections, is developed to exten... A two-dimensional (2D) full band self-consistent ensemble Monte Carlo (MC) method for solving the quantum Boltzmann equation, including collision broadening and quantum potential corrections, is developed to extend the MC method to the study of nano-scale semiconductor devices with obvious quantum mechanical (QM) effects. The quantum effects both in real space and momentum space in nano-scale semiconductor devices can be simulated. The effective mobility in the inversion layer of n and p channel MOSFET is simulated and compared with experimental data to verify this method. With this method 50nm ultra thin body silicon on insulator MOSFET are simulated. Results indicate that this method can be used to simulate the 2D QM effects in semiconductor devices including tunnelling effect. 展开更多
关键词 quantum mechanical effect Monte Carlo method semiconductor device carrier transport
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FINITE DIFFERENCE FRACTIONAL STEP METHODS FOR THE TRANSIENT BEHAVIOR OF A SEMICONDUCTOR DEVICE 被引量:4
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作者 袁益让 《Acta Mathematica Scientia》 SCIE CSCD 2005年第3期427-438,共12页
Characteristic finite difference fractional step schemes are put forward. The electric potential equation is described by a seven-point finite difference scheme, and the electron and hole concentration equations are t... Characteristic finite difference fractional step schemes are put forward. The electric potential equation is described by a seven-point finite difference scheme, and the electron and hole concentration equations are treated by a kind of characteristic finite difference fractional step methods. The temperature equation is described by a fractional step method. Thick and thin grids are made use of to form a complete set. Piecewise threefold quadratic interpolation, symmetrical extension, calculus of variations, commutativity of operator product, decomposition of high order difference operators and prior estimates are also made use of. Optimal order estimates in l2 norm are derived to determine the error of the approximate solution. The well-known problem is thorongley and completely solred. 展开更多
关键词 General region semiconductor device 3-dimensional heat conduction characteristic finite difference parallel fractional steps l^2 error estimate.
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Effect of NO annealing on charge traps in oxide insulator and transition layer for 4H-SiC metal–oxide–semiconductor devices 被引量:1
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作者 贾一凡 吕红亮 +10 位作者 钮应喜 李玲 宋庆文 汤晓燕 李诚瞻 赵艳黎 肖莉 王梁永 唐光明 张义门 张玉明 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第9期484-488,共5页
The effect of nitric oxide(NO) annealing on charge traps in the oxide insulator and transition layer in n-type4H–Si C metal–oxide–semiconductor(MOS) devices has been investigated using the time-dependent bias s... The effect of nitric oxide(NO) annealing on charge traps in the oxide insulator and transition layer in n-type4H–Si C metal–oxide–semiconductor(MOS) devices has been investigated using the time-dependent bias stress(TDBS),capacitance–voltage(C–V),and secondary ion mass spectroscopy(SIMS).It is revealed that two main categories of charge traps,near interface oxide traps(Nniot) and oxide traps(Not),have different responses to the TDBS and C–V characteristics in NO-annealed and Ar-annealed samples.The Nniotare mainly responsible for the hysteresis occurring in the bidirectional C–V characteristics,which are very close to the semiconductor interface and can readily exchange charges with the inner semiconductor.However,Not is mainly responsible for the TDBS induced C–V shifts.Electrons tunneling into the Not are hardly released quickly when suffering TDBS,resulting in the problem of the threshold voltage stability.Compared with the Ar-annealed sample,Nniotcan be significantly suppressed by the NO annealing,but there is little improvement of Not.SIMS results demonstrate that the Nniotare distributed within the transition layer,which correlated with the existence of the excess silicon.During the NO annealing process,the excess Si atoms incorporate into nitrogen in the transition layer,allowing better relaxation of the interface strain and effectively reducing the width of the transition layer and the density of Nniot. 展开更多
关键词 4H–SiC metal–oxide–semiconductor devices NO annealing near interface oxide traps oxide traps
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IMPLICIT-EXPLICIT MULTISTEP FINITE ELEMENT-MIXED FINITE ELEMENT METHODS FOR THE TRANSIENT BEHAVIOR OF A SEMICONDUCTOR DEVICE
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作者 陈蔚 《Acta Mathematica Scientia》 SCIE CSCD 2003年第3期386-398,共13页
The transient behavior of a semiconductor device consists of a Poisson equation for the electric potential and of two nonlinear parabolic equations for the electron density and hole density. The electric potential equ... The transient behavior of a semiconductor device consists of a Poisson equation for the electric potential and of two nonlinear parabolic equations for the electron density and hole density. The electric potential equation is discretized by a mixed finite element method. The electron and hole density equations are treated by implicit-explicit multistep finite element methods. The schemes are very efficient. The optimal order error estimates both in time and space are derived. 展开更多
关键词 semiconductor device strongly A(0)-stable multistep methods finite element methods mixed finite element methods
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A BLOCK-CENTERED UPWIND APPROXIMATION OF THE SEMICONDUCTOR DEVICE PROBLEM ON A DYNAMICALLY CHANGING MESH
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作者 Yirang YUAN Changfeng LI Huailing SONG 《Acta Mathematica Scientia》 SCIE CSCD 2020年第5期1405-1428,共24页
The numerical simulation of a three-dimensional semiconductor device is a fundamental problem in information science. The mathematical model is defined by an initialboundary nonlinear system of four partial differenti... The numerical simulation of a three-dimensional semiconductor device is a fundamental problem in information science. The mathematical model is defined by an initialboundary nonlinear system of four partial differential equations: an elliptic equation for electric potential, two convection-diffusion equations for electron concentration and hole concentration, and a heat conduction equation for temperature. The first equation is solved by the conservative block-centered method. The concentrations and temperature are computed by the block-centered upwind difference method on a changing mesh, where the block-centered method and upwind approximation are used to discretize the diffusion and convection, respectively. The computations on a changing mesh show very well the local special properties nearby the P-N junction. The upwind scheme is applied to approximate the convection, and numerical dispersion and nonphysical oscillation are avoided. The block-centered difference computes concentrations, temperature, and their adjoint vector functions simultaneously.The local conservation of mass, an important rule in the numerical simulation of a semiconductor device, is preserved during the computations. An optimal order convergence is obtained. Numerical examples are provided to show efficiency and application. 展开更多
关键词 three-dimensional semiconductor device of heat conduction block-centered upwind difference on a changing mesh local conservation of mass convergence analysis numerical computation
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Black phosphorus-based field effect transistor devices for Ag ions detection 被引量:5
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作者 Hui-De Wang David K Sanf +5 位作者 Zhi-Nan Guo Rui Cao Jin-Lai Zhao Muhammad Najeeb Ullah Shah Tao-Jian Fan Dian-Yuan Fanl Han Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第8期35-41,共7页
Black phosphorus (BP), an attractive two-dimensional (2D) semiconductor, is widely used in the fields of optoelec- tronic devices, biomedicine, and chemical sensing. Silver ion (Ag+), a commonly used additive i... Black phosphorus (BP), an attractive two-dimensional (2D) semiconductor, is widely used in the fields of optoelec- tronic devices, biomedicine, and chemical sensing. Silver ion (Ag+), a commonly used additive in food industry, can sterilize and keep food fresh. But excessive intake of Ag+ will harm human health. Therefore, high sensitive, fast and simple Ag+ detection method is significant. Here, a high-performance BP field effect transistor (FET) sensor is fabricated for Ag+ detection with high sensitivity, rapid detection speed, and wide detection concentration range. The detection limit for Ag+ is 10 l0 mol/L. Testing time for each sample by this method is 60 s. Besides, the mechanism of BP-FET sensor for Ag+ detection is investigated systematically. The simple BP-FET sensor may inspire some relevant research and potential applications, such as providing an effective method for the actual detection of Ag+, especially in wimessed inspections field of food. 展开更多
关键词 black phosphorus semiconductor devices chemical sensing witnessed inspections
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Recent progress on ambipolar 2D semiconductors in emergent reconfigurable electronics and optoelectronics
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作者 赵月豪 孙浩然 +3 位作者 盛喆 张卫 周鹏 张增星 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第12期21-39,共19页
In these days,the increasing massive data are being produced and demanded to be processed with the rapid growth of information technology.It is difficult to rely solely on the shrinking of semiconductor devices and sc... In these days,the increasing massive data are being produced and demanded to be processed with the rapid growth of information technology.It is difficult to rely solely on the shrinking of semiconductor devices and scale-up of the integrated circuits(ICs)again in the foreseeable future.Exploring new materials,new-principle semiconductor devices and new computing architectures is becoming an urgent topic in this field.Ambipolar two-dimensional(2D)semiconductors,possessing excellent electrostatic field controllability and flexibly modulated major charge carriers,offer a possibility to construct reconfigurable devices and enable the ICs with new functions,showing great potential in computing capacity,energy efficiency,time delay and cost.This review focuses on the recent significant advancements in reconfigurable electronic and optoelectronic devices of ambipolar 2D semiconductors,and demonstrates their potential approach towards ICs,like reconfigurable circuits and neuromorphic chips.It is expected to help readers understand the device design principle of ambipolar 2D semiconductors,and push forward exploring more new-principle devices and new-architecture computing circuits,and even their product applications. 展开更多
关键词 two-dimensional material ambipolar semiconductor semiconductor device
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Clockwise vs Counter-Clockwise I-V Hysteresis of Point-Contact Metal-Tip/Pr0.7 Ca0.3MnO3/Pt Devices 被引量:2
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作者 刚建雷 黎松林 +3 位作者 廖昭亮 孟洋 梁学锦 陈东敏 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期256-259,共4页
Metal-tip/Pr0.7Ca0.3MnO3/Pt devices possess two types of I-V hysteresis: clockwise vs counter clockwise depending on the tip materials. The criteria for categorization of these two types of devices can be simply base... Metal-tip/Pr0.7Ca0.3MnO3/Pt devices possess two types of I-V hysteresis: clockwise vs counter clockwise depending on the tip materials. The criteria for categorization of these two types of devices can be simply based on whether the Gibbs free energy of oxidation for the metal tip is lower or higher than that of PCMO, respectively. While the clockwise hysteresis can be attributed to electric field induced oxidation/reduction, the counter clockwise hysteresis can be explained by oxygen vacancy migration in an electrical field. Alternating-current conductance spectra also reveal distinct hopping barriers between these two categories of devices at high resistive states. 展开更多
关键词 Electronics and devices semiconductors Condensed matter: structural mechanical & thermal Chemical physics and physical chemistry
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Phase transition and charge transport through a triple dot device beyond the Kondo regime
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作者 Yong-Chen Xiong Zhan-Wu Zhu Ze-Dong He 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第10期628-634,共7页
Semiconductor quantum dot structure provides a promising basis for quantum information processing, within which to reveal the quantum phase and charge transport is one of the most important issues. In this paper, by m... Semiconductor quantum dot structure provides a promising basis for quantum information processing, within which to reveal the quantum phase and charge transport is one of the most important issues. In this paper, by means of the numerical renormalization group technique, we study the quantum phase transition and the charge transport for a parallel triple dot device in the strongly correlated limit, focusing on the effect of inter-dot hopping t beyond the Kondo regime. We find the quantum behaviors depend closely on the initial electron number on the dots, and the present model may map to single,double, and side-coupled impurity models in different parameter spaces. An orbital spin-1/2 Kondo effect between the conduction leads and the bonding orbital, and several magnetic-frustration phases are demonstrated when t is adjusted to different regimes. To understand these phenomena, a canonical transformation of the energy levels is given, and important physical quantities with respect to increasing t and necessary theoretical discussions are shown. 展开更多
关键词 semiconductor quantum dot device parallel triple dot structure quantum phase transition charge transport strongly correlated effect
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Research progress in terahertz quantum-cascade lasers and quantum-well photodetectors 被引量:3
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作者 Zhi-Yong Tan Wen-Jian Wan Jun-Cheng Cao 《Chinese Physics B》 SCIE EI CAS CSCD 2020年第8期59-71,共13页
As semiconductor devices,the terahertz quantum-cascade laser is a coherent source based on intersubband transitions of unipolar carriers while the terahertz quantum-well photodetector is a kind of detector which match... As semiconductor devices,the terahertz quantum-cascade laser is a coherent source based on intersubband transitions of unipolar carriers while the terahertz quantum-well photodetector is a kind of detector which matches the laser frequency.They are solid-state,electrically operated,and can be easily integrated with other components.This paper reviews the state of the art for the design,working performance,and future directions of the two devices.Their applications in photoelectric characterization and imaging are also discussed. 展开更多
关键词 TERAHERTZ semiconductor device photoelectric characterization imaging system
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Comparisons of STRETCH meat grinders based on two different topologies of ICCOS
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作者 刘辉 毕世华 +2 位作者 李军 刘培柱 陈阵 《Journal of Beijing Institute of Technology》 EI CAS 2013年第4期432-439,共8页
Inductive energy storage systems (IES)require opening switches which are technically much more difficult to realize than closing switches. Institute of Advanced Technology ( IAT ) puts forward a meat grinder with ... Inductive energy storage systems (IES)require opening switches which are technically much more difficult to realize than closing switches. Institute of Advanced Technology ( IAT ) puts forward a meat grinder with an inductive pulse power topology called slow transfer of energy through capacitive hybrid (STRETCH). In this topology, an integrated gate-commutated thyristor (IGCT) is capable of breaking the charging currents on the order of 4 kA, and it may encounter difficulties in expanding to higher energy systems. German-French Institute of Saint Louis (ISL) has developed a high-power opening switch based on standard high-power thyristors by using their so-called inverse current commutation with semiconductor devices (ICCOS) countercurrent commutation principle. Two topologies of the STRETCH meat grinder with ICCOS are analyzed. And they are compared based on the voltage across the main switch, the current multiplication factor and other aspects by u- sing Matlab simulations. The advantages and disadvantages of the two topologies are shown through the comparisons. Therefore a more suitable topology can be chosen for realistic applications accord- ing to their performances. 展开更多
关键词 inductive pulse power supplies STRETCH meat grinder IGCT inverse current commu-tation with semiconductor devices (ICCOS) comparisons
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High Power, Room Temperature Terahertz Emitters Based on Dopant Transitions in 6H-Silicon Carbide
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作者 James Kolodzey Guang-Chi Xuan +2 位作者 Peng-Cheng Lv Nathan Sustersic Xin Ma 《Journal of Electronic Science and Technology》 CAS 2014年第3期250-254,共5页
Electrically pumped high power terahertz (THz) emitters that operated above room temperature in a pulse mode were fabricated from nitrogen-doped n-type 6H-SiC. The emission spectra had peaks centered on 5 THz and 12... Electrically pumped high power terahertz (THz) emitters that operated above room temperature in a pulse mode were fabricated from nitrogen-doped n-type 6H-SiC. The emission spectra had peaks centered on 5 THz and 12 THz (20 meV and 50 meV) that were attributed to radiative transitions of excitons bound to nitrogen donor impurities. Due to the relatively deep binding energies of the nitrogen donors, above 100 meV, and the high thermal conductivity of the SiC substrates, the THz output power and operating temperature were significantly higher than previous dopant based emitters. With peak applied currents of a few amperes, and a top surface area of 1 mm2, the device emitted up to 0.5 mW at liquid nitrogen temperature (77 K), and tens of microwatts up to 333 K. This result is the highest temperature of THz emission reported from impurity-based emitters. 展开更多
关键词 Intracenter radiative transitions semiconductor devices silicon carbide terahertz emitting devices wide band gap semiconductors
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Effect of Channel Length and Width on NBTI in Ultra Deep Sub-Micron PMOSFETs 被引量:2
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作者 曹艳荣 马晓华 +1 位作者 郝跃 田文超 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第3期262-265,共4页
The effects of channel length and width on the degradation of negative bias temperature instability (NBTI) are studied. With the channel length decreasing, the NBTI degradation increases. As tile channel edges have ... The effects of channel length and width on the degradation of negative bias temperature instability (NBTI) are studied. With the channel length decreasing, the NBTI degradation increases. As tile channel edges have more damage and latent damage for the process reasons, the device can be divided into three parts: the gate and source overlap region, the middle channel region, and the gate and drain overlap region. When the NBTI stress is applied, the non-uniform distribution of the generated defects in the three parts will be generated due to the inhomogeneous degradation. With tile decreasing channel length, tile channel edge regions will take up a larger ratio to the middle channel region and the degradation of NBTI is enhanced. The channel width also plays an important role in the degradation of NBTI. There is an inflection point during the decreasing channel width. There are two particular factors: the lower vertical electric field effect for the thicker gate oxide thickness of the sha/low trench isolation (STI) edge and the STI mechanical stress effecting on the NBTI degradation. The former reduces and the latter intensifies the degradation. Under the mutual compromise of the both factors, when the effect of the STI mechanical stress starts to prevail over the lower vertical electric field effect with the channel width decreasing, the inflection point comes into being. 展开更多
关键词 Electronics and devices semiconductors
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Electrical Characteristics of High-Performance ZnO Field-Effect Transistors Prepared by Ultrasonic Spray Pyrolysis Technique 被引量:1
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作者 YI Ming-Dong XIE Ling-Hai +2 位作者 LIU Yu-Yu DAI Yan-Eeng HUANG Jin-Ying 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第1期179-181,共3页
We have fabricated ZnO-based thin-film transistors (TFTs) by low-cost ultrasonic spray pyrolysis. The devices exhibit high saturation mobility of about 0. 6 cm2 /Vs and on-off current ratio of 10^5. The electrical c... We have fabricated ZnO-based thin-film transistors (TFTs) by low-cost ultrasonic spray pyrolysis. The devices exhibit high saturation mobility of about 0. 6 cm2 /Vs and on-off current ratio of 10^5. The electrical characteristics of ZnO-based TFTs show that ultrasonic spray pyrolysis technique can be used as a promising approach to attain high-performance electronic devices. Furthermore, the deposition techniques make the operating process attractive for flexible electronics. 展开更多
关键词 Electronics and devices semiconductors Surfaces interfaces and thin films
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Effect of In Composition on Two-Dimensional Electron Gas in Wurtzite AlGaN/InGaN Heterostructures 被引量:1
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作者 KIM Bong-Hwan PARK Seoung-Hwan +1 位作者 LEE Jung-Hee MOON Yong-Tae 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第11期188-190,共3页
The effect of In composition on two-dimensional electron gas in wurtzite AlGaN/InGaN heterostructures is theoretically investigated. The sheet carrier density is shown to increase nearly linearly with In mole fraction... The effect of In composition on two-dimensional electron gas in wurtzite AlGaN/InGaN heterostructures is theoretically investigated. The sheet carrier density is shown to increase nearly linearly with In mole fraction x, due to the increase in the polarization charge at the AlGaN/InGaN interface. The electron sheet density is enhanced with the doping in the AlGaN layer. The sheet carrier density is as high as 3.7×1013 cm^-2 at the donor density of 10×1018 cm^-3 for the HEMT structure with x=0.3. The contribution of additional donor density on the electron sheet density is nearly independent of the In mole fraction. 展开更多
关键词 Condensed matter: electrical magnetic and optical Electronics and devices semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal Nanoscale science and low-D systems
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Electrical Response of Flexible Vanadyl-Phthalocyanine Thin-Film Transistors under Bending Conditions 被引量:1
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作者 王贺 李春红 +2 位作者 王丽娟 王海波 闫东航 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期303-306,共4页
Flexible vanadyl-phthalocyanine (VOPc) thin-film transistors are fabricated by the weak epitaxy growth (WEG) method. The devices show a mobility of 0.5 cm2/Vs, an on/off ratio of 105 and a low leakage current of 1... Flexible vanadyl-phthalocyanine (VOPc) thin-film transistors are fabricated by the weak epitaxy growth (WEG) method. The devices show a mobility of 0.5 cm2/Vs, an on/off ratio of 105 and a low leakage current of 10-9 A. The performances exhibit strong dependence on bending conditions and reversible change can be found when the bending strain is less than 1.5%. This results from the change of the trap density calculated by subthreshold slopes. The results indicate that VOPc films fabricated by the WEG method have good durability to flexing and possess great potential in flexible electronics. 展开更多
关键词 Electronics and devices semiconductors
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Effect of Dopant Properties on the Microstructures and Electrical Characteristics of Poly(3-Hexylthiophene) Thin Films
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作者 马良 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第11期162-165,共4页
Effects of dopant properties on microstructures and the electrical characteristics of poly (3-hexylthiophene) (P3HT) films are studied by doping 0.1 wt% 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4?T... Effects of dopant properties on microstructures and the electrical characteristics of poly (3-hexylthiophene) (P3HT) films are studied by doping 0.1 wt% 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4?TCNQ), 6,6-phenyl-C61butyric acid methyl ester (PCBM) and N,N'?Diphenyl-N,N'-(m-tolyl)-benzidine (TPD) into P3HT, respectively. The introductions of various dopants in small quantities increase the field-effect mobility and the I on/Ioff ratio of P3HT thin-film transistors. However, each of dopants shows various effects on the crystalline order and the molecular orientation of P3HT films and the performance of P3HT thin-film transistors. These can be attributed to the various size, shape and energy-level properties of the dopants. 展开更多
关键词 Soft matter liquids and polymers Electronics and devices semiconductors Surfaces interfaces and thin films
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High-Current Multi-Finger Mesa InGaAs/InP DHBTs
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作者 金智 程伟 +3 位作者 苏永波 刘新宇 徐安怀 齐鸣 《Chinese Physics Letters》 SCIE CAS CSCD 2009年第12期247-249,共3页
Characteristics of single- and multi-finger mesa InGaAs/InP double heterojunction bipolar transistors (DHBTs) are compared. The current gain decreases with the increasing number nf of the emitter fingers due to the ... Characteristics of single- and multi-finger mesa InGaAs/InP double heterojunction bipolar transistors (DHBTs) are compared. The current gain decreases with the increasing number nf of the emitter fingers due to the mutual thermal interaction between the fingers. The Kirk current can be as high as 150mA for four-finger DHBT. No degradation of the peak of the current gain cutoff frequency ft is found for multi-finger DHBTs. The peak of the maximum oscillation frequency fmax decreases with an increase of nf due to the increasing parasitic resistance of the base. The results are very helpful for applications of the common-base DHBTs in power amplifiers operating at very high frequencies. 展开更多
关键词 Electronics and devices semiconductors Surfaces interfaces and thin films
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Electrical Property of Infrared-Sensitive InAs Solar Cells
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作者 邓惠勇 王奇伟 +4 位作者 陶俊超 吴杰 胡淑红 陈鑫 戴宁 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第11期95-98,共4页
InAs infrared-sensitive solar cells are fabricated by using the films grown by the liquid phase epitaxy technique. The film microstructures are characterized by x-ray diffraction and scanning electronic microscopy. Th... InAs infrared-sensitive solar cells are fabricated by using the films grown by the liquid phase epitaxy technique. The film microstructures are characterized by x-ray diffraction and scanning electronic microscopy. The current-voltage characteristics of the solar cells in the dark and under AM1.5 illumination at 300 K and 77 K are discussed. The conversion efficiency of p-InAs/n-sub InAs cells decreases when the thickness of the p-type film changes from 1.7 μm to 3.5 μm, which is caused by the reduced effective photons near p?n junction. The p-InAs/n-InAs/n-sub InAs solar cell with the conversion efficiency of 7.43% in 1-2.5 μm under AM1.5 at 77 K is obtained. The short circuit current density increases dramatically with decreasing temperature due to the weakened effect of phonon scattering. 展开更多
关键词 Electronics and devices semiconductors Surfaces interfaces and thin films
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Self-Collimation in Planar Photonic Crystals Fabricated by CMOS Technology
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作者 杨志峰 武爱民 +4 位作者 方娜 蒋寻涯 林旭林 王曦 邹世昌 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期90-92,共3页
We report a self-collimating demonstration in planar photonic crystals (PhCs) fabricated in silicon-on-insulator (SOI) wafers using 0.18 μm silicon complimentary metal oxide semiconductor (CMOS) techniques. The... We report a self-collimating demonstration in planar photonic crystals (PhCs) fabricated in silicon-on-insulator (SOI) wafers using 0.18 μm silicon complimentary metal oxide semiconductor (CMOS) techniques. The emphasis was on demonstrating the self-collimation effect by using the standard CMOS equipment and process development of an optical test chip using a high-volume manufacturing facility. The PhCs are designed on the 230-nm-top-Si layer using a square lattice of air holes 280 nm in diameter. The lattice constant of the PhCs is 380 nm. The experimentally obtained wavelengths for self-collimation are in excellent agreement with theory. 展开更多
关键词 Electronics and devices semiconductors Optics quantum optics and lasers
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