摘要
根据时域移相算法的概念 ,提出了一种空间移相术 ,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化 .运用这种技术在Twyman Green移相式干涉仪中建立了一套自适应抗振系统 ,它可以实时测量振动引起的相位变化大小 ,并通过反馈器件PZT实时校正干涉条纹的相位 ,使得干涉条纹稳定以保证光学测量的正常进行 ,与此同时PZT还作为移相器件 .
Based on the conception of the phase-shifting method in time domain, a new technique named spatial phase-shifting method is presented. It can detect the phase variation caused by fringe movement due to the external perturbations. This method is applied to a Twyman-Green phase shifting interferometer in which an adaptive vibration-resistant system has been built. In this interferometer, the fringe phase is calibrated in real time by a piezoelectric transducer (PZT) used as both phase-shifting and motional feedback device, thus fringe pattern is stabilized and the optical testing can be carried out.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2003年第8期969-972,共4页
Acta Photonica Sinica
基金
国防军工计量"十五"重点项目资助 (项目编号 :6 0 80 3134)
关键词
空间移相术
自适应抗振
移相式干涉仪
Phase-shifting interferometer
Vibration-resistance
Spatial phase-shifting method
