摘要
在云纹干涉法的基础上,研究了一种新的测量方法——云纹干涉载波条纹法,利用初始载波条纹根据物体变形前后的变化对应变进行分析。实验证明:在结合适当的数字图像处理技术情况下,应用频率为1200 lp/mm的试件栅,测量试件(微观场)变形产生的应变时,精度基本控制在±10με的范围内。对该方法的研究表明:其灵敏度可在1με以下。方法可给出U场诸行、V场诸列的平均应变值,使研究微观场小应变及微观场临近区域微小应变的不同成为可能。这一技术为MEMS研究中对相关力学内容的分析提供了技术支持。
A new measurement method, carrier fringe method of Moiré interferometry, was studied. The strain was analyzed with the initial carrier fringes according to the change of the carrier fringes before and after deformation of an object. The experiment justified that the accuracy was controlled within the range of ±10με when the strain caused by the deformation of UUT was measured with the grating of 1200 lp/mm combined with appropriate digital image processing method. The research indicates that the strain sensitivity is less than 1 με. The average strain values of every row of U field and every column of V field are given by the method. This makes it possible to investigate the tiny strain and the tiny strain difference between the adjacent areas of a micro-field. The technology can be used for further analysis of the correlative mechanics in MEMS.
出处
《应用光学》
CAS
CSCD
2007年第5期636-640,共5页
Journal of Applied Optics
基金
国防重点预研课题基金资助
关键词
云纹干涉载波条纹
微观场
小应变
测量精度
应变灵敏度
carrier fringe of Moiré interferometry
micro-field
tiny strain
measuring accuracy
strain sensitivity
作者简介
曹字东（1980-），男，内蒙古赤峰市人，硕士，研究实习员，主要从事光测力学及闪光照相光电接收系统的研究。E-mail：caoyudongwangtao@126．com
