摘要
详细介绍了硅微型梳状线振动驱动式陀螺仪的工作原理,给出了硅微型梳状线振动驱动式陀螺仪的结构示意图.应用牵连运动的加速度合成定理,通过严格的力学分析和严密的数学演算得到了硅微型梳状线振动驱动式陀螺仪的活动质量的加速度表达式.并应用力学牛顿定律推导了硅微型梳状线振动驱动式陀螺仪的一个微分方程数学模型.并对数学模型进行了求解,最后利用方程的解分析了硅微型梳状线振动驱动式陀螺仪的基本工作规律.
The operating principle of a lateral comb drive micromachined silicon gyroscopes is discussed with its structural sketch given.An expression has been established for the acceleration of a lateral comb drive micromachined silicon gyroscope using the acceleration composition theorem,and a differential equation model has been established for lateral comb drive micromachined silicon gyroscopes.The solution to the differential equation model has been obtained and the fundamental operating law of the lateral comb drive micromachined silicon gyroscopes is then analysed.
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
2003年第1期49-53,共5页
Journal of Harbin Engineering University
