摘要
通过对柔性波导叠层结构以及机械可转移(MT)组件耦合结构进行精细调控,成功实现了柔性波导的被动式水平耦合端接。该水平耦合端接方法具备良好的工艺可行性,且封装成本较低。经端接后的柔性波导器件表现出良好的正位度,波导通道耦合位差被有效控制在8μm以内。针对长度为220 mm的柔性波导链路进行测试,其平均插入损耗为6.64 dB,波导传输损耗为3.30 dB,发送(Tx)端口的平均耦合损耗为0.5 dB。受模式不匹配因素的影响,接收(Rx)端口的平均耦合损耗达2.84 dB。将此柔性波导器件接入10 Gbit/s的高速传输系统后,实现了无误码传输,并获得了张开的眼图。此外,测试实验结果表明,所制备的柔性聚合物波导器件具有稳健的光学性能,在机械可靠性和环境可靠性方面表现优异。在2.5 mm弯曲半径以及扭曲2圈的工况下,该柔性波导器件的高速传输性能未受到明显影响,眼图几乎未出现劣化现象。同时,经过85℃温度、85%相对湿度的湿热环境处理以及温度循环实验后,波导器件的传输性能未发生明显劣化。本研究成果为低成本、高可靠柔性波导器件的规模化制备提供了重要的参考依据。
Objective Flexible polymer waveguides,characterized by high bandwidth,low loss,shape flexibility,ease of integration,high-density interconnection capabilities,and high reliability,represent a prime choice for realizing highspeed,reliable,and cost-effective optical interconnections within next-generation high-performance board-level interconnection architectures.Nevertheless,challenges such as mode-related losses and coupling issues in these waveguides remain to be resolved.This work is dedicated to the fabrication of high-reliability flexible polymer waveguide devices and a comprehensive exploration of their high-speed transmission performance.Methods The flexible waveguide lamination structure and mechanically transferable(MT)component coupling structure were meticulously regulated.The core and cladding materials with a refractive index difference of about 0.011 at 850 nm were used.The flexible waveguide was fabricated on polyimide substrate via conventional lithography techniques.Passive horizontal coupling termination of the flexible waveguide was combined with MT components,and an epoxy encapsulation adhesive was utilized for molding purposes.Results and Discussions The fabricated flexible waveguide device demonstrated outstanding alignment,with waveguide channel coupling misalignment effectively confined within 8μm.For a 220-mm-long flexible waveguide link,the average insertion loss was 6.64 dB,which could be decomposed into a waveguide transmission loss of 3.30 dB,an average coupling loss of 0.5 dB at the Tx port,and an average coupling loss of 2.84 dB at the Rx port,primarily attributed to mode mismatch.When integrated into a 10 Gbit/s high-speed transmission system,error-free transmission was successfully achieved,accompanied by the acquisition of an open eye diagram.The device exhibited robust optical properties,and its high-speed transmission performance remained largely unaffected under a bending radius of 2.5 mm and two twists,with negligible degradation in the eye diagram.Following an aging test with a temperature of 85℃ and a relative humidity of 85% and a temperature cycling test,the transmission performance of the waveguide device did not exhibit significant deterioration.Conclusions This work successfully realized rapid horizontal coupling termination of flexible waveguides via passive alignment methods.The fabricated flexible waveguide devices feature precise alignment,low insertion loss,and exceptional high-speed transmission performance and reliability.These devices hold great promise for substituting fiber arrays and serving as core optical components in the domain of board-level optical interconnections.
作者
周进群
缪桦
刘晓锋
Zhou Jinqun;Miao Hua;Liu Xiaofeng(Shennan Circuits Co.,Ltd.,Shenzhen 518117,Guangdong,China)
出处
《光学学报》
北大核心
2025年第11期238-245,共8页
Acta Optica Sinica
基金
“十四五”共用技术预研项目(50923070107)。
关键词
光子器件
柔性聚合物波导
水平光耦合
高速传输性能
性能可靠性
photonic devices
flexible polymer waveguides
horizontal optical coupling
high-speed transmission performance
performance reliability
作者简介
通信作者:刘晓锋,Liuxf@scc.com.cn。
