摘要
快速反射镜(快反镜)在宽温度范围下的高精度稳定运行依赖于有效的温度补偿,而其内置电涡流传感器探头所处环境温度的精确感知是实现补偿的关键难点。为解决该探头环境温度难以直接测量的问题,文章提出了一种基于阻抗相位角变化的温度检测方法。该方法通过检测探头受温度影响后在电路中阻抗相位角的变化,推算探测环境的温度。基于电涡流传感器的涡流效应和电路工作原理,建立了多物理场模型,进行了温度对电涡流传感器阻抗相位角影响的仿真分析,并设计了相应的相位测量电路。针对实际应用场景,开展了温度循环实验,测量了电路中阻抗角的相位变化。实验结果表明,所提方法能够有效获取电涡流传感器所处环境的实时温度,为快反镜的温度补偿提供了一种新的解决方案。
The high-precision and stable operation of the rapid reflector mirror(fast-reflector mirror)over a wide temperature range relies on effective temperature compensation.The precise perception of the ambient temperature of the built-in eddy current sensor probe is the key difficulty for achieving this compensation.To address the problem of the difficulty in directly measuring the probe's ambient temperature,the paper proposes a temperature detection method based on the change in impedance phase angle.The method detects the change in impedance phase angle of the probe in the circuit after it is affected by temperature,and calculates the temperature of the detection environment.Based on the eddy current effect of the eddy current sensor and the working principle of the circuit,a multi-physics field model is established,and the simulation analysis of the influence of temperature on the impedance phase angle of the eddy current sensor is carried out.A corresponding phase measurement circuit is designed.For practical application scenarios,temperature cycling experiments were conducted to measure the phase change of the impedance angle in the circuit.The experimental results show that the proposed method can effectively obtain the real-time temperature of the environment where the eddy current sensor is located,providing a new solution for the temperature compensation of the fast-reflector mirror.
作者
李莹
吕勇
王艳林
LI Ying;LÜYong;WANG Yanlin(School of Instrument Science and Optoelectronic Engineering,Beijing Information Science and Technology University,Beijing 100192,China)
出处
《传感器世界》
2025年第6期1-8,共8页
Sensor World
关键词
快反镜
电涡流传感器
相位测量
温度测量
FSM
eddy current sensor
phase measurement
temperature measurement
作者简介
李莹:北京信息科技大学仪器科学与光电工程学院,硕士,主要从事光电检测方面的研究。通信地址:北京信息科技大学小营校区,邮编:100192,邮箱:1195926660@qq.com;通信作者:吕勇:北京信息科技大学仪器科学与光电工程学院,教授,研究方向为光电检测、精密光机电一体化;王艳林:北京信息科技大学仪器科学与光电工程学院,副教授,研究方向为电子测量及光学检测。
