摘要
为提高磁控溅射薄膜表面完整性的综合性能,以42CrMo为基体、MoS2-Ti为镀层设计正交试验,基于试验数据和主效应分析法探索了加工参数对表面完整性的影响规律;利用田口理论基本特性研究了加工参数对表面完整性的显著性;通过信噪比-灰色理论计算了表面完整性的灰色关联度,建立了其多元回归预测模型并进行方差分析,最终获得了最优加工参数组合。结果表明:表面粗糙度随溅射功率、沉积温度增加而减小,随沉积气压增加而增加,残余压应力与硬度皆随溅射功率、沉积温度、沉积气压增大而增大;溅射功率对表面完整性的影响最大,沉积温度次之,沉积气压最小;多元回归方程的相关系数均在95%以上,证明了模型的可靠性;最优加工参数组合为溅射功率300 W,沉积温度240℃,沉积气压1.0 Pa。
In order to improve the comprehensive performance of the surface integrity of magnetron sputtered films,an orthogonal experiment is designed with 42CrMo as the substrate and MoS2-Ti as the coating.Based on the experimental data and main effect analysis method,the influence of processing parameters on the surface integrity is explored.The significance of processing parameters on surface integrity is studied using the basic characteristics of Taguchi theory.The grey correlation degree of surface integrity is calculated using signal-to-noise ratio grey theory,and a multiple regression prediction model is established for variance analysis.Finally,the optimal combination of machining parameters is obtained.The results show that:the surface roughness decreases with the increase of sputtering power and deposition temperature,and increases with the increase of deposition pressure.The residual stress and hardness both increase with the increase of sputtering power,deposition temperature,and deposition pressure.The sputtering power has the greatest impact on surface integrity,followed by deposition temperature and deposition pressure.The correlation coefficients of the multiple regression equations are all above 95%,proving the reliability of the model.The optimal combination of processing parameters were identified to be sputtering power of 300 W,deposition temperature of 240℃,and deposition pressure of 1.0 Pa.
作者
马吉建
MA Jijian(Engineering Training Institute,Guangxi Technological College of Machinery and Electricity,Nanning 530007,China)
出处
《机械设计与研究》
北大核心
2025年第2期169-174,180,共7页
Machine Design And Research
基金
广西机电职业技术学院2021年资助项目(2021YKYZ008)
关键词
磁控溅射
主效应分析
田口理论
多元回归
灰色关联度
magnetron sputtering
main effects analysis
Taguchi theory
multiple regression
grey correlation degree
作者简介
马吉建(1980-),男,本科,副教授,主要研究方向为机械设计与制造和职业教育实践教学改革,已发表论文18篇,E-mail:majijian1980@126.com
