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镍含量对CrTiSiN-Ni复合薄膜结构与性能的影响

Effect of Ni Content on Structure and Properties of CrTiSiN-Ni Composite Film
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摘要 使用非平衡磁控溅射法在YG10硬质合金基底上依次制备铬过渡层、CrN中间层和不同镍含量(0.5%,1.6%,5.6%,9.6%,14.4%,原子分数)的CrTiSiN-Ni复合薄膜,研究了镍含量对复合薄膜结构、力学性能和摩擦学性能的影响。结果表明:不同镍含量复合薄膜中的结晶相均主要为面心立方结构CrN/TiN,镍部分固溶于基体相,超出固溶极限后以单质相存在;随着镍含量增加,复合薄膜的硬度、弹性模量和断裂韧度先增大后减小,镍原子分数在1.6%~5.6%时硬度达到最大(27.1 GPa),在5.6%时断裂韧度最大(3.56 MPa·m^(1/2));随着镍含量增加,CrTiSiN-Ni复合薄膜的平均摩擦因数增大,磨痕变宽变深,耐磨性能降低。 The chromium transition layer,CrN intermediate layer and CrTiSiN-Ni composite films with different nickel atomic fractions(0.5%,1.6%,5.6%,9.6%,14.4%)were fabricated on YG10 hard alloy matrix by nonequilibrium magnetron sputtering.The effect of nickel content on the structure,mechanical properties and tribological properties of the composite films was studied.The results show that the crystalline phases of the composite films with different Ni content mainly consisted of face-centered cubic CrN/TiN,and a portion of Ni was solid-solved in the matrix phase,once the solid-solution limit was exceeded,it existed as pure phase.With the increase of Ni content,the hardness,elastic modulus and fracture toughness of the composite film first increased and then decreased.The hardness reached the maximum(27.1 GPa)when the Ni atomic fraction was in range of 1.6%to 5.6%,and the fracture toughness was the largest(3.56 MPa·m^(1/2))when the Ni atomic fraction was 5.6%.With the increase of Ni content,the average friction coefficient of the CrTiSiN-Ni composite film increased,the wear scar became wider and deeper,and the wear resistance decreased.
作者 赵荣幸 钱同林 付永强 吴志威 ZHAO Rongxing;QIAN Tonglin;FU Yongqiang;WU Zhiwei(Engineering Technology Training Center,Nanjing University of Industry Technology,Nanjing 210023,China;College of Mechanical Engineering,Qingdao University of Technology,Qingdao 266520,China)
出处 《机械工程材料》 北大核心 2025年第7期37-44,共8页 Materials For Mechanical Engineering
基金 江苏省教育科学规划课题(C/2023/02/12) 国家自然科学基金资助项目(52205204)。
关键词 CrTiSiN-Ni复合薄膜 显微组织 力学性能 韧性 CrTiSiN-Ni composite film microstructure mechanical property toughness
作者简介 赵荣幸(1984-),男,江苏南京人,高级工程师,硕士。
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