摘要
采用热丝化学气相沉积(HFCVD),通过改变氮气浓度(0%~10%,体积分数),在杆状硬质合金上沉积金刚石涂层。采用扫描电子显微镜、X射线衍射、拉曼光谱、三维表面测量仪和洛氏压痕法分析和测量沉积金刚石涂层的形貌、结构、结晶质量、表面粗糙度(R_(a))和膜基结合强度。结果表明,氮的掺入显著减小金刚石晶粒尺寸,降低残余应力。氮气浓度为3%时,平均粒径为100 nm,残余应力最小为-1.4 GPa,膜基结合性能最好。随着氮气浓度增加,金刚石结晶质量下降,表面粗糙度减小,氮气浓度为10%时,R_(a)为93 nm。
Diamond coatings were deposited on rod-shaped cemented carbide by hot-filament chemical vapor deposition(HFCVD)at different nitrogen concentrations(0~10%,volume fraction).The morphology,structure,crystal quality,surface roughness(R_(a)),and adhesion strength between film and substrate of diamond coatings were analyzed and measured by scanning electron microscope,X-ray diffraction,Raman spectroscopy,three-dimensional surface measurement,and Rockwell indentation.The results show that the grain size and residual stress of diamonds are reduced significantly by adding nitrogen.When the nitrogen concentration is 3%,the mean grain size is 100 nm,with the minimum residual stress of−1.4 GPa and the best adhesion strength between film and substrate.The crystal quality and surface roughness of diamond coatings decrease with the increase in nitrogen concentration.When the nitrogen concentration is 10%,R_(a) is 93 nm.
作者
唐彬媛
徐银超
王程一
温光华
陈响明
李园园
Tang Binyuan;Xu Yinchao;Wang Chengyi;Wen Guanghua;Chen Xiangming;Li Yuanyuan(Zhuzhou Cemented Carbide Cutting Tools Co.,Ltd.,Zhuzhou Hunan 412000,China)
出处
《硬质合金》
2025年第3期199-207,共9页
Cemented Carbides
基金
湖南省自然科学基金项目(2023JJ50221)。
作者简介
唐彬媛(1992-),女,湖南株洲人,硕士研究生,从事金刚石涂层硬质合金研究。E-mail:tangbinyuan123@163.com。
