摘要
激光加工中常对切割剖面的形状有一定要求,如希望将加工面的锥度控制在一定范围之内。为此,了解激光束与物质作用的特点及其相关参数对切割剖面的影响就显得十分有必要。本文计算皮秒脉冲激光加工中的切口角与激光束基本特性的关系,在此基础上结合实例对振镜和旋光两种主要切割方式进行讨论,分析切口角或加工锥度与激光加工参数间的关系及其控制,据此可了解激光加工后的剖面形状特点,并对相关几何参数进行预估。此外,也对其他一些类似加工方式中的切口角控制进行介绍,分析各自的优点及其相关限制因素,以便能针对不同的具体要求采用合适的加工方式。
In laser processing,controlling the shape of the cutting profile,particularly the taper,is often essential.Under-standing the interaction characteristics between the laser and the material,as well as the effects of processing parameters on the profile,is crucial.This study calculates the relationship between kerf angle and fundamental laser beam features during picosec-ond laser processing.Based on these results,two primary dicing modesvibration mirror scanning and helical cuttingare ex-amined.The influence of laser processing parameters on kerf angle in these modes is analyzed in conjunction with practical ap-plications,enabling an understanding of the post-processing profile shape and estimation of relevant geometric parameters.Ad-ditionally,the paper discusses kerf angle control in other similar laser processing methods,analyzing their respective advanta-ges and limitations to guide the selection of appropriate techniques for specific requirements.
作者
张忆南
Zhang Yinan(Shanghai JiWu Optoelectronic Technology Co.,Ltd.,Shanghai 201815,China)
出处
《应用激光》
北大核心
2025年第4期40-47,共8页
Applied Laser
作者简介
张忆南(1987-),女,本科,工程师。研究方向为红外探测器组件封装。E-mail:666shelley@sina.com。
