摘要
超高加速度宏微运动平台是一种超精密定位设备,柔性定位平台对宏微运动平台的稳定性起到至关重要的作用。为增加它的稳定性和安全性,采用有限元方法,通过静力分析、屈曲分析和响应面优化设计,来提高柔性定位平台综合性能。建立柔性定位平台三维模型,对模型进行有限元分析,得到最大等效应力、最大等效应变和负载乘数数据和云图。以柔性定位平台槽的尺寸和位置为优化变量,以负载乘数、最大等效应力及最大等效应变为优化目标进行响应面优化。结果表明:优化后的柔性定位平台在质量几乎不变的条件下负载乘数增加了1.7%,最大等效应力减少了4.3%,最大等效应变减少了4.7%,提高了超高加速度宏微运动平台的稳定性。
Ultra-high acceleration macro-micro motion platform is a ultra-precision positioning device,and the flexible positioning platform plays a vital role in the stability of the macro-micro motion platform.To enhance its stability and safety,the finite element method was used,the comprehensive performance of the flexible positioning platform was improved through static analysis,buckling analysis and response surface optimization design.A 3D model of the flexible positioning platform was established,the finite element analysis of the model was performed and the maximum equivalent stress,maximum equivalent strain and load multiplication data and cloud charts were obtained.The size and position of the flexible positioning platform slot were selected as the optimization variable.The load multiplication,the maximum equivalent stress and maximum equivalent strain were taken as optimization target for response surface optimization.The results show that the load multiplication of the optimized flexible positioning platform is increased by 1.7%with nearly constant mass,the maximum equivalent stress is reduced by 4.3%and the maximum equivalent strain is reduced by 4.7%,the stability of the ultra-high acceleration macro-micro motion platform is improved.
作者
张璐凡
孙贺贺
闫恒
张鹏启
姜薄士
ZHANG Lufan;SUN Hehe;YAN Heng;ZHANG Pengqi;JIANG Boshi(School of Mechatronics Engineering,Henan University of Technology,Zhengzhou Henan 450001,China)
出处
《机床与液压》
北大核心
2024年第20期162-167,共6页
Machine Tool & Hydraulics
基金
国家自然科学基金青年科学基金项目(51705132)
河南省科技厅自然科学项目(222102220088)
河南省教育厅自然科学项目(21A460006)。
关键词
柔性定位平台
屈曲分析
超精密定位
优化设计
flexible positioning platform
buckling analysis
ultra-precision positioning
optimal design
作者简介
张璐凡(1984-),男,博士,副教授,研究方向为仿真优化和微电子制造等。E-mail:89551677@qq.com。
