摘要
The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness.Therefore,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and systems.Femtosecond laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication.FsLDW exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano manufacturing.FsLDW has demonstrated its value in the fabrication of various microoptical systems.This study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic systems.Finally,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.
基金
supported by the National Natural Science Foundation of China(Nos.62275044,62205174,61875036)
the Jinan“20 New Colleges and Universities”Innovation Team Introduction Project(202228047).
作者简介
Correspondence:Yu-Qing Liu(liuyq@nenu.edu.cn);Correspondence:Hua Liu(liuh146@nenu.edu.cn)。
