摘要
为了满足磁悬浮轴承面向更高精度的发展需求,提出基于LC并联谐振的轴向自感式位移传感器.通过增大谐振回路的等效电感变化率,提高传感器的灵敏度.分析传感器的工作原理.通过有限元仿真,研究传感器设计参数与灵敏度之间的关系.设计传感器的测量电路,结合有限元仿真和数值仿真,分析LC并联谐振对传感器灵敏度的影响.搭建实验台,对传感器的静态性能进行测试.结果表明,相对于传统的位移传感器,提出的传感器具有更高的灵敏度与更低的线性度.
An axial self-inductive displacement sensor based on LC parallel resonance was proposed in order to meet the development demands for higher precision in magnetic bearings.The sensitivity of the sensor was improved by increasing the rate of change of equivalent inductance in the resonance circuit.The working principle of the sensor was analyzed.The relationship between the design parameters of the sensor and its sensitivity was analyzed through finite element simulation.Then a measurement circuit for the sensor was designed,and the influence of LC parallel resonance on the sensitivity of the sensor was analyzed combined with finite element simulation and numerical simulation.An experimental setup was constructed to test the static performance of the sensor.Results show that the proposed sensor exhibits higher sensitivity and lower linearity compared with traditional displacement sensors.
作者
唐洪洲
周瑾
金超武
徐园平
TANG Hongzhou;ZHOU Jin;JIN Chaowu;XU Yuanping(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
出处
《浙江大学学报（工学版）》
EI
CAS
CSCD
北大核心
2024年第5期1072-1079,共8页
Journal of Zhejiang University：Engineering Science
基金
国家自然科学基金资助项目(52075239,52275537)。
关键词
位移传感器
并联谐振
测量电路
灵敏度
磁悬浮轴承
displacement sensor
parallel resonance
measurement circuit
sensitivity
magnetic bearing
作者简介
唐洪洲(1999-),男,硕士生,从事传感器技术的研究.orcid.org/0009-0007-5428-5004.E-mail:hztang@nuaa.edu.cn;通信联系人:周瑾,女,教授.orcid.org/0000-0001-6966-4671.E-mail:zhj@nuaa.edu.cn。
