摘要
为了优化AlTiN和AlTiSiN的沉积温度,兼顾2种涂层的性能,采用电弧离子镀膜技术,在不同沉积温度下,制备一系列AlTiN/AlTiSiN多层复合涂层,并采用SEM、XRD、EDS、纳米压痕仪、划痕仪、摩擦磨损试验机和轮廓仪等仪器对复合涂层的微观结构、力学性能以及摩擦学性能进行表征和测试,探究沉积温度对AlTiN/AlTiSiN多层复合涂层的影响.结果表明:(1)随着沉积温度升高,多层复合涂层的表面质量逐渐改善,组织结构更加致密;(2)随着沉积温度升高,涂层的纳米硬度和膜基结合强度先增大后减小,摩擦系数和磨损率先减小后增大;(3)当沉积温度为430℃时,涂层综合性能最好,硬度为30.9GPa,临界载荷为89N,摩擦系数为0.72,磨损率为7.1×10^(-3)μm^(3)/(N·μm).
In order to optimize the deposition temperature of AlTiN and AlTiSiN and take into account the performance of the two coatings,a series of AlTiN/AlTiSiN composite coatings were prepared by arc ion plating at different deposition temperatures.The microstructure,mechanical properties and tribological properties of the coating were characterized and tested by SEM,XRD,EDS,nano indentation instrument,scratch instrument,friction and wear tester and profiler.The effects of deposition temperature on AlTiN/AlTiSiN multilayer composite coatings were systematically explored.The experimental results showed that:①With the increase of deposition temperature,the surface quality of the composite coating was gradually improved,and the microstructure was more compact;②With the increase of deposition temperature,the nano-hardness and film-based bonding strength of the coating first increased and then decreased,and the friction coefficient and wear first decreased and then increased;③When the deposition temperature was 430℃,the comprehensive properties of the coating were the best,with hardness of 30.9 GPa,critical load of 89 N,friction coefficient of 0.72 and wear rate of 7.1×10^(-3)μm^(3)/(N·μm).
作者
张雅倩
刘艳梅
王重阳
黄美东
范其香
曹凤婷
王铁钢
ZHANG Yaqian;LIU Yanmei;WANG Chongyang;HUANG Meidong;FAN Qixiang;CAO Fengting;WANG Tiegang(Tianjin Key Laboratory of High Speed Cutting and Precision Machining,Tianjin University of Technology and Education,Tianjin 300222,China;College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China)
出处
《天津师范大学学报（自然科学版）》
CAS
北大核心
2023年第3期19-25,共7页
Journal of Tianjin Normal University：Natural Science Edition
基金
天津市教委科研计划重点项目(2021ZD005)。
作者简介
第一作者:张雅倩(1997-),女,硕士研究生;通信作者:刘艳梅(1976-),女,副教授,主要从事硬质薄膜方面的研究.E-mail:ymliu@tute.edu.cn;通信作者:王铁钢(1978-),男,教授,主要从事刀具涂层和高温防护涂层方面的研究.E-mail:tgwang@tute.edu.cn.
