摘要
高精度光栅位移测量系统具有纳米级重复精度、环境适应性强、维度易于扩展等优点,可以满足精密制造行业对米级测量量程、亚微米级精度与多维测量能力融合的测量技术要求,在高端制造、精密仪器等领域有重要应用。通过对测量光栅的各项参数进行研究,提升了测量光栅的尺寸与制作精度;提出高精度锥面衍射光栅位移测量、高倍细分转向干涉光栅位移测量、“品”字形拼接大量程光栅位移测量等技术,实现了数百毫米测量量程亚微米级测量精度。从光栅制作到测量系统研制对提升精度、分辨力及量程提供了理论分析与技术验证。
High-precision grating displacement measurement system has the advantages of nanometer repetition accuracy,strong environmental adaptability,and easy expansion of dimensions.It can meet the measurement requirements of the precision manufacturing industry for the integration of meter-level measurement range,submicron-level accuracy and multi-dimensional measurement capability.It has important applications in high-end manufacturing,precision instruments and other fields.By study⁃ing the parameters of the measuring grating,the size and manufacturing accuracy of the measuring grating are improved.Highprecision conical diffraction grating displacement measurement,high power subdividing steering interferometric grating displace⁃ment measurement,品-shaped splicing large range grating displacement measurement and other technologies are proposed to achieve sub-micron measurement accuracy in hundreds of millimeter measurement range.From grating fabrication to measurement system development,theoretical analysis and technical verification are provided for improving measurement accuracy,resolution and range.
作者
刘林
刘兆武
于宏柱
王玮
姜岩秀
姜珊
孙宇佳
金思宇
梁旭
巴音贺希格
李文昊
LIU Lin;LIU Zhaowu;YU Hongzhu;WANG Wei;JIANG Yanxiu;JIANG Shan SUN Yujia;JIN Siyu;LIANG Xu;BAYANHESHIG;LI Wenhao(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)
出处
《计测技术》
2023年第1期81-90,共10页
Metrology & Measurement Technology
基金
中国科学院战略性先导科技专项(C类)(XDC04030100)
国家自然科学基金项目(U21A20509)。
关键词
光栅位移测量
锥面衍射
转向干涉
大量程拼接
gating displacement measurement
conical diffraction
steering interference
large range splicing
作者简介
第一作者:刘林(1996-),男,中科院特别研究助理,博士,主要从事高性能光栅位移测量研究;通讯作者:李文昊(1980-),男,研究员,博士,主要从事各类高精度光栅设计及研制、高性能光栅位移测量研究。
