摘要
基于柔性材料的微型压力传感器对机器人手指的触觉建立是近年来的热门研究领域。为克服传统微型电容式压力传感器灵敏度低和线性度差等问题,提出了一种基于聚酰亚胺(PI)材料构建的电容式触觉单元。利用平面极板与倒凸形空腔相结合的结构,使响应具有2段连续的高线性区间,其空间分辨率达到亚毫米级。有限元分析结果表明:在0~15 kPa和15~120 kPa范围内触觉单元灵敏度高达4.17 fF/kPa和0.28 fF/kPa,同时具有良好的应力分布和频率带宽。研究了其在不同人工表皮厚度环境下的性能,并给出了器件工艺流程。本文方案的提出为人工指尖的触觉感知提供了一种新的实现方式。
Micro pressure sensors based on flexible materials are a hot research field of touch receptor for robot fingers in recent years.In order to overcome low sensitivity and poor linearity of the traditional micro capacitive pressure sensor, a capacitive tactile unit based on polyimide(PI)is designed with a submillimeter resolution.The device is composed of planer plates and an inverted convex cavity, and the structure enables the response with two continuous high linear ranges.In addition, the finite element analysis demonstrates the sensitivity of the tactile unit with 4.17 fF/kPa and 0.28 fF/kPa in the range of 0~15 kPa and 15~120 kPa, respectively.It has good stress distribution and frequency bandwidth.The performance in different artificial skin thickness environments is also investigated.Finally, the process for this unit is suggested.This work provides a novel way to realize the tactile perception of artificial fingertips.
作者
杨俊
戚昊琛
YANG Jun;QI Haochen(School of Microelectronics,Hefei University of Technology,Hefei 230009,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第3期91-94,99,共5页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(62074047)
合肥工业大学青年教师科研创新启动专项项目(JZ2021HGQA0261)。
关键词
触觉传感器
亚毫米
聚酰亚胺
电容式
高线性
有限元分析
tactile sensor
submillimeter
polyimide(PI)
capacitive
high linearity
finite element
作者简介
通讯作者:杨俊(1997-),男,硕士研究生,研究方向为电容式柔性微型压力传感器;戚昊琛(1981-),女,博士,高级实验师,硕士研究生导师,主要研究领域为微传感器及系统研发。
