摘要
基于 MEMS 工艺，提出了一种球冠形底部固定极板与复合膜可动上极板结合的电容式微机械压力传感器。改变了经典的上下电极接触过程，并增加了深刻蚀工艺附加深孔结构，使传感器几乎完全工作在线性区间。针对其量程，分析了复合膜厚度对极板接触状态及线性度的影响，并利用有限元分析法对结构进行了模拟与验证，最后给出了工艺流程说明。该方案可为工作于100~800 kPa 的汽车胎压监控（TPMS）提供一种新的传感器实现方式。
A MEMS capacitive micromechanical pressure sensor with high linearity is presented,which is based on a fixed spherical cap electrode and a multiple membrane.In this device,the touch process of electrodes starts at the beginning of measuring range,and a structure of hole made by DRIE is added.The novel device can enable a good linearity during the whole measuring range.The analysis of membrane thickness to touch status and linearity is performed,so that the novel structure is verified to be effective.Furthermore,the fabrication process of this device is proposed and introduced.This high-linear micromechanical pressure sensor can provide a good choice to tire pressure monitoring system （TPMS）,which will work at the press range of 100 kPa to 800 kPa.
出处
《微电子学与计算机》
CSCD
北大核心
2015年第9期114-118,123,共6页
Microelectronics & Computer
基金
浙江省自然科学基金项目(LY13F010006)
关键词
MEMS
工艺
接触式
压力传感器
复合膜
高线性度
MEMS fabrication
touch mode
pressure sensor
multiple membranes
high linearity
作者简介
胡智文 男，（1975-），博士，副教授．研究方向为传感器及系统研究．Email：sunneyhu@gmail．com,
