摘要
通过环境控制可以有效减少微纳米坐标测量机中由机械热变形带来的测量误差。文章以基于自然对流原理的微纳米坐标测量机用高精度恒温箱为研究对象,从环境温度扰动、系统模型稳定性等方面分析制约恒温箱性能的因素,并根据系统模型辨识结果进行Simulink仿真,验证结论的有效性;为提高恒温箱自适应能力,利用LabVIEW模糊工具包,设计基于模糊PID的温度控制系统。实验结果表明,基于模糊PID控制的恒温箱对环境温度变化的适应性增强3倍,稳态控制精度均优于±0.03℃,系统鲁棒性强。
The measurement error caused by mechanical thermal deformation in micro/nano coordinate measuring machine can be effectively reduced through temperature control. With the research object of the high precision constant temperature chamber based on natural convection for micro/nano coordinate measuring machine, the reasons restricting the performance of the chamber are analyzed from the perspectives of ambient temperature disturbance and system model stability. And the simulation is carried out through Simulink to demonstrate the effectiveness of the conclusion according to the system model identification results. In order to improve the adaptive ability of the constant temperature chamber, a temperature control system based on fuzzy PID is designed by using the LabVIEW fuzzy toolkit. The experimental results show that the adaptability of the chamber based on fuzzy PID control to the ambient temperature is improved by three times, and the steady-state control accuracy is better than ± 0.03 ℃. The system has strong robustness.
作者
程东旭
陈芝飞
苏东赢
马少华
李瑞君
CHENG Dongxu;CHEN Zhifei;SU Dongying;MA Shaohua;LI Ruijun(Technology Center,China Tobacco Henan Industrial Co.,Ltd.,Zhengzhou 450016,China;School of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei 230009,China)
出处
《合肥工业大学学报（自然科学版）》
CAS
北大核心
2022年第9期1160-1164,共5页
Journal of Hefei University of Technology：Natural Science
基金
国家重点研发计划资助项目(2019YFB2004900)
国家烟草专卖局标准制修订资助项目(2013115)
河南中烟工业有限责任公司科技资助项目(A202015)。
关键词
精密环境控制
高精度温度控制
恒温箱
模糊PID
精密测量
precision environmental control
high precision temperature control
constant temperature chamber
fuzzy PID
precision measurement
作者简介
程东旭(1989—),男,河南南阳人,河南中烟工业有限责任公司工程师;陈芝飞(1979—),男,浙江苍南人,河南中烟工业有限责任公司研究员;通信作者:李瑞君(1976—),男,内蒙古和林格尔人,博士,合肥工业大学教授,博士生导师,E-mail:rj-li@hfut.edu.cn.
