摘要
为了提高平面度测量的精度,提出优化点激光方法。首先将点激光测量坐标系进行转换;然后用激光束进行平面标定,同时通过滑动滤波对激光采集混有的噪声点进行降噪,以免影响测试,建立测量数据的非线性误差和激光位移传感器输出模型进行输出误差补偿;最后通过最小二乘算法获得最佳拟合平面。实例验证结果显示,优化点激光的平面度误差测量平均值为5.189μm,相比直接法、平面扫描仪法、横截线扫描法、点激光测量法、光谱共焦法测量平面度误差,分别减少了18.77%、16.78%、12.45%、9.17%、6.54%,测量精度较高。
In order to improve the accuracy of flatness measurement,an optimized point laser method is proposed.Firstly,point laser measurement coordinate system is converted.Secondly,plan is calibrated with laser beam,and mixed noise points of laser acquisition are reduced using sliding filter to avoid affecting the test.Nonlinear error of measurement data and output model of laser displacement sensor are established to compensate the output error.Finally,the best fitting plane is obtained by least square algorithm.Experiment results show that the average flatness error of the optimized point laser is 5.189μm,which is 18.77%,16.78%,12.45%,9.17%and 6.54%lower than direct method,plane scanning,transverse scanning,point laser and spectral confocal,and the measurement accuracy is higher than other algorithms.
作者
刘许亮
Liu Xuliang(Yellow River Conservancy Technical Institute,Kaifeng,Henan475000,China)
出处
《应用激光》
CSCD
北大核心
2022年第5期88-94,共7页
Applied Laser
基金
河南省高等学校重点科研计划项目(14B510026)。
关键词
激光
降噪
平面度
误差
laser
noise reduction
flatness
error
作者简介
刘许亮(1982-),男,硕士,副教授。研究方向:电子信息工程技术。E-mail:lxul1982@qq.com。
