摘要
介介绍了二碘硅烷性质,叙述了包括以硅烷与碘化氢、以苯基硅烷与碘、硅和碘化氢或硅和氢/碘为原料、二氯硅烷、二苯硅烷和碘化氢为原料的合成制备方法,以及其应用领域。认为随着半导体工业的发展,二碘硅烷作为新的硅前驱体材料将发挥越来越重要的作用;以苯硅烷原料路线和二氯氢硅为原料的工艺路线,具有一定的工业化前景。
The properties of diiodosilane were introduced,including the synthesis and preparation methods of silane and hydrogen iodide,phenylsilane and iodine,silicon and hydrogen iodide or silicon and hydrogen/iodine,dichlorosilane,diphenylsilane and hydrogen iodide,and their application fields.It is believed that with the development of semiconductor industry,diiodosilane will play an increasingly important role as a new silicon precursor material.The process route with phenylsilane raw material and dichlorosilane as raw material has a certain industrial prospect.
作者
黄明星
杨海波
姚晓艳
郑佳
HUANG Mingxing;YANG Haibo;YAO Xiaoyan;ZHENG Jia(Zhejiang Juhua Technology Center Co.Ltd.,Quzhou,Zhejiang 324004)
出处
《化工生产与技术》
CAS
2022年第4期14-16,I0003,共4页
Chemical Production and Technology
关键词
二碘硅烷
硅烷
碘
diiodosilane
silane
iodine
作者简介
黄明星(1988-),男,硕士,工程师,从事精细化工和环保技术开发工作。电子邮件:huangmingxing2014@163.com。
