摘要
为了解决气浮光学平台在水平方向超低频减振的问题以提高超精密实验的产出质量,提出基于调谐液柱阻尼器(TLCD)的气浮光学平台流固耦合理论,用来实现最优调谐控制和实验精度的提升。首先对TLCD进行原理分析并推导出固有频率的设计范围;其次对TLCD气浮光学平台流固耦合系统进行建模及推导;接着对流固耦合系统进行响应特性分析及参数优化;最后对时域响应和光学实验进行验证分析。结果表明,当固有频率比一定时,存在一个最优阻尼比可以使减振效率取得最大值,共振峰处的减振效率达到66.76%;同时通过调控小孔板可以使TLCD减振系统适合宽频激励的工况,气浮光学平台动力响应的有效控制有利于提高实验精度,为超精密实验品质的提升提供了一种有效控制手段。
In order to solve the problem of ultra-low frequency vibration reduction of air-floating optical platform in horizontal direction and improve the output quality of ultra-precision experiments,the fluid-structure coupling theory of airfloating optical platform based on tuned liquid column damper(TLCD)is proposed to achieve optimal tuning control and improve experimental accuracy.First,the principle of TLCD is analyzed and the design range of natural frequency is deduced.Second,the fluid-structure coupling system of TLCD air floating optical platform is modeled and deduced.Then,the response characteristics and parameter optimization of the convection-solid coupling system are analyzed.Finally,the time-domain response and optical experiments are verified and analyzed.The results show that when the natural frequency ratio is constant,there is an optimal damping ratio which can make the maximum vibration reduction efficiency,and the vibration reduction efficiency at the resonance peak reaches 66.76%.At the same time,the TLCD damping system can be suitable for broadband excitation by adjusting the keyhole plate,and the effective control of the dynamic response of the air floating optical platform is beneficial to improve the experimental accuracy,which provides an effective control means for the improvement of the quality of ultra-precision experiment.
作者
崔文辉
朱健强
何媛琦
刘志刚
樊全堂
林炜恒
董子铭
Cui Wenhui;Zhu Jianqiang;He Yuanqi;Liu Zhigang;Fan Quantang;Lin Weiheng;Dong Ziming(Joint Laboratory on High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2021年第21期146-154,共9页
Acta Optica Sinica
基金
中国科学院国际合作局对外合作重点项目(181231KYSB20170022)
中国科学院战略性先导科技专项(A类)(XDA25020304)。
关键词
光学设计
气浮光学平台
调谐液柱阻尼器
流固耦合
稳定性
参数优化
optical design
air floating optical platform
tuned liquid column damper
fluid-structure coupling
stability
parameter optimization
作者简介
通信作者:崔文辉,whcui@siom.ac.cn;通信作者:朱健强,jqzhu@siom.ac.cn。
