摘要
扫描测头是高精度三维螺纹综合测量机的核心部件,其动态特性严重影响了整机的精度。为了提高测量机的精度,对高精度螺纹三维尺寸测量线性扫描测头的动态特性进行了研究。首先分析了三维螺纹综合测量机用扫描测头的测量原理,然后建立了动态特性模型并提出了影响动态测量结果的因素,最后通过实验验证了这种测头结构的动态特性和测量处理方式的有效性。实验结果验证了影响因素的正确性,优化影响最大的采样间距因素可以过滤80%的无效数据点,从而使该段拟合平均残差平方和误差减小了91.0%,线性误差减小了67.4%,进而提高了三维螺纹测量机的测量精度。
The scanning probe is the core part of the high precision 3 D thread synthetical measuring machine, its dynamic characteristics seriously affect the precision of the machine. In order to improve the precision of the measuring machine, the dynamic characteristics of the linear scanning probe for 3 D size measurement of high precision thread are studied. Firstly, the measuring principle of the scanning probe used in the 3 D thread synthetical measuring machine is analyzed, then the dynamic characteristic model is established and the factors affecting the dynamic measurement result are put forward. Finally, the dynamic characteristic of the probe structure and the effectiveness of the measuring processing method are verified through experiments. The experiment results verify the correctness of the influencing factors. Through optimizing the sampling spacing factor that has the greatest influence, 80% of invalid data points can be filtered, so that the mean residual sum of squares error of the fitting in this section is reduced by 91.0% and the linear error is reduced by 67.4%. The measurement accuracy of 3 D thread measuring machine is improved.
作者
林希萌
禹静
杨艳玲
蔡晋辉
李东升
Lin Ximeng;Yu Jing;Yang Yanling;Cai Jinhui;Li Dongsheng(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2021年第1期92-98,共7页
Chinese Journal of Scientific Instrument
基金
国家重点研发计划项目(2018YFF01013102)资助。
关键词
接触式测量
扫描测头
动态特性
测头精度
contact measurement
scanning probe
dynamic characteristic
accuracy of measuring head
作者简介
林希萌,2018年于山东理工大学获得学士学位,现为中国计量大学硕士研究生,主要研究方向为接触式扫描测头、动态特性。E-mail:1605696736@qq.com;通信作者:禹静,2008年于湖南大学获得学士学位,2011年于中国计量学院获得硕士学位,2015年于天津大学获得博士学位,现为中国计量大学副教授,主要研究方向为超精密测量技术。E-mail:yujing88@cjlu.edu.cn。
