摘要
基于涡旋光与球面波的干涉原理,提出一种物体微位移的光学测量方法。改进马赫泽德干涉光路,其中一束光照射至空间光调制器产生涡旋光束作为参考光,另一束光经透镜变为球面波后照射至物体上,两束光干涉后干涉条纹呈螺旋状分布。当物体发生微小位移时两束光的光程差改变,螺旋干涉条纹发生旋转,通过干涉条纹的旋转角度可以确定物体的微位移量。经理论分析、仿真和实验证明:基于涡旋光与球面波干涉螺旋条纹旋转角度的变化能够实时监测物体位移量的变化,同时可以有效计算物体的微位移。实验中,测量物体的产生位移量为27 nm,通过涡旋光与球面波干涉螺旋条纹旋转角度的变化实际测得物体的位移为25.75 nm,误差为1.25 nm。
Based on the theory of vortex beams and spherical wave interference, an optical measurement method for object micro-displacement was proposed. After improving the Mach-Zehnder interference optical path, a vortex beam was generated as a reference beam, using the spatial light modulator illuminated by a beam of light,and another beam was transformed into a spherical wave through the lens and illuminated to the object. The interference fringes were distributed in a spiral shape as the two beams interfered. When the object has a microdisplacement, the optical path difference of the two beams changes, and the spiral interference fringe rotates.Noticing this phenomenon, the micro-displacement of the object can be determined by the rotation angle of the spiral interference which vortex beams interference with spherical wave. Through theoretical analysis, simulation and experiments have proved that the micro-displacement of the object can be monitored in real time, and effectively calculated by the rotation angle change of spiral fringe based on interference of vortex beams and spherical wave. In the experiment, the displacement of the measured object is 27 nm, the actual measured displacement of the object is 25.75 nm, and the error is 1.25 nm compared with the theoretical value.
作者
赵冬娥
王思育
马亚云
张斌
李诺伦
李沅
褚文博
Zhao Dong’e;Wang Siyu;Ma Yayun;Zhang Bin;Li Nuolun;Li Yuan;Chu Wenbo(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;State Key Laboratory of Electronic Testing Technology,North University of China,Taiyuan 030051,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2020年第4期167-172,共6页
Infrared and Laser Engineering
基金
装备预研领域基金(61404150304)。
关键词
涡旋光
微位移
螺旋相位
空间光调制器
vortex beam
micrometric displacement
spiral phase
spatial light modulator
作者简介
赵冬娥(1970-),女,教授,硕士生导师,博士,主要从事涡旋光测量技术、高光谱检测、光学设计和光电检测方面的研究。E-mail:zhaodonge@nuc.edu.cn。
