摘要
由SOI片制备的微多环谐振陀螺仪在测试过程中,不可避免地会引入馈通信号,而目前常用的差分检测馈通取消方式高度依赖微陀螺仪和检测电路的对称性,不能有效地消除馈通信号。针对此问题,提出了一种基于反相信号的馈通取消方案,通过在驱动和检测电极之间施加与馈通信号反相的信号,从而抵消馈通效应带来的干扰,该方法理论上可以在不降低驱动力的情况下将馈通信号完全取消。实验结果表明,该方法能有效消除馈通信号对电容检测的影响,谐振峰高度可提高约25倍。
In the test process of the micro multi-ring resonant gyroscope fabricated with SOI slice,it is inevitable to introduce the feed-through signal.However,the feed-through cancellation method based on differential detection which is current commonly used is highly dependent on the symmetry of the micro gyroscope and the detection circuit,which cannot effectively eliminate the feed-through signal.In order to solve this problem,a feed-through cancellation scheme based on the inverting signal is proposed, which can eliminate the interference caused by feed-through effect by applying the signal which is opposite to the feedthrough signal between the driving and the detection electrode.In theory,this method can completely cancel the feed-through signal without reducing the driving force.Experimental results show that this method can effectively eliminate the influence of the feed-through signal on the capacitance detection,and the resonance peak height can be increased by about 25 times.
作者
田梦雅
张卫平
谷留涛
刘朝阳
薛冰
TIAN Mengya;ZHANG Weiping;GU Liutao;LIU Zhaoyang;XUE Bing(National Key Lab.of Science and Technol.on Micro/Nano Fabrication,Key Lab.for Thin Film and Microfabrication of the Ministry of Education.Department of Micro and Nano Electron.,School of Electronic Information and Electrical Engin.,Shanghai Jiao Tong University,Shanghai 200240,CHN)
出处
《半导体光电》
CAS
北大核心
2020年第1期54-58,共5页
Semiconductor Optoelectronics
基金
国家自然科学基金项目(61574093)
预研基金项目(614280504010317,6140863020202)
上海专业技术服务平台项目(19DZ2291103)
教育部新世纪优秀人才支撑计划项目(NCET-10-0583).
关键词
微多环陀螺仪
电容检测
馈通效应
电学模型
馈通取消
micro multi-ring resonant gyroscope
capacitance detection
feed-through effect
electrical model
feed-through cancellation
作者简介
田梦雅(1995-),女,硕士研究生,主要研究方向为微陀螺仪测控系统;张卫平(1971-),男,博士,教授,博士生导师,主要研究方向为先进微型机器人与微型无人机、先进微纳惯性技术、微机电系统、精密仪器、电路控制与嵌入式系统及其集成技术。E-mail:zwp37@163.com。
