摘要
提出了一种基于微杠杆原理的左右分布式低交叉耦合、高灵敏度的硅微谐振加速度计结构。该结构采用了一级微杠杆放大机构,左右双音叉谐振器和单质量块布局,实现了力放大和差动频率输出,具有结构简单、易于加工的特点,且两音叉谐振器间相互干扰小。首先,优化了设计参数,并进行了模态分析与谐响应分析。结果表明,左右谐振工作谐振频率分别为149.49 kHz和150.8 kHz,在该工作频率下X方向的最大位移远大于Y和Z方向（两个数量级以上）,表明工作模态具有优良的抗干扰能力。其次,在1 000g加速度载荷作用下进行了极限过载仿真。仿真结果表明,其最大应力为612.69 MPa,表明具有一定的抗冲击能力。最后,在±50g的设计量程内对结构的灵敏度进行了仿真分析。仿真结果表明,其灵敏度为160.51 Hz/g,验证了该设计的正确性。
A two-wing distribution silicon micro resonant accelerometer （TWDSMA） structure with low-coupling and high sensitivity based on the principle of micro leverage was proposed. A micro leverage magnifying mechanism,a left and right （two-wing） double fork resonant structure and a single mass block layout were adopted to realize the force amplification and frequency difference output. The struture was simple and easy processing,and the interference between two fork resonctors was tiny. Firstly,the design parameters were optimized,and the modal analysis and harmonic response analysis were carried out. The results show that the operating resonant frequency of the left and right resonator are 149. 49 kHz and 150. 8 kHz,and the displacement in X axis is much larger than those in Y and Z axes （more than100 times）,which indicates the excellent anti-interference ability of the working mode. Then,the limit overload simulation was carried out with 1 000 g acceleration load. The simulation results show that the maximum stress is 612. 69 MPa,indicating that the system has a definite impact resistance. Finally,the sensitivity of the structure was simulated and analyzed within the design range of ± 50 g. The simula-tion results show that the sensitivity is 160. 51 Hz/g,proving the correctness of the design.
出处
《半导体技术》
CAS
CSCD
北大核心
2018年第3期171-176,共6页
Semiconductor Technology
基金
国家自然科学基金资助项目(51705477)
山西省回国留学人员科研资助项目(2016-083)
中北大学电子测试技术重点实验室开放基金资助项目(ZDSYSJ2015004)
毁伤技术重点学科实验室开放基金资助项目(DXMBJJ2017-15)
作者简介
段晓敏（1983-），男，山西忻州人，博士，电子科技大学电子工程学院在站博士后，研究方向为MEMS惯性传感器系统集成技术；;曹麓亮（1986-），男，河北石家庄人，博士，副教授，硕士研究生导师，研究方向为MEMS惯性器件设计、加工及制造。通信作者：曹慧亮，E-mail：caohuiliang@nuc．edu．cn
