摘要
为提高晶圆制造整体式自动化物料搬运系统和晶圆加工系统的综合性能,提出了一种基于模糊逻辑控制的动态调度方法。该方法实时采集系统中的晶圆卡交货期、晶圆卡等待时间和AMHS搬运负载情况等信息,通过模糊逻辑控制模型动态调整系统当前调度规则,从而实现OHT实时高效搬运晶圆。仿真实验表明:基于模糊逻辑控制的动态调度方法在OHT平均利用率、晶圆平均搬运时间、晶圆平均等待时间和晶圆平均交货期满意度等性能指标方面优于传统单一规则,验证了该方法的有效性。
To improve comprehensive performances of the unified automated material handling system(AMHS) and semiconductor wafer fabrication system(SWFS), a fuzzy logic control based dynamic scheduling approach was proposed. The SWFS′s information such as wafer lot′s due date, wafer lot′s waiting time and AMHS′s loading ratio were collected in real-time in this approach. Then, the appropriate scheduling rule was dynamically selected by fuzzy logic control model according to the collected information, thereby the wafer lots were transported by OHTs in real-time and efficiently. Simulation experiments showed that the proposed fuzzy logic control based dynamic scheduling approach had better comprehensive performances than the traditional single scheduling rules in terms of OHT′s average utilization ratio, average delivery time, average waiting time and average due date satisfaction rate of wafer lots, and meanwhile had better effectiveness.
作者
吴立辉
宋昊举
张金星
WU Li-hui;SONG Hao-ju;ZHANG Jin-xing(School of Mechanical & Electrical Engineering, Henan University of Technology, Zhengzhou 450001,China)
出处
《组合机床与自动化加工技术》
北大核心
2019年第5期152-155,共4页
Modular Machine Tool & Automatic Manufacturing Technique
基金
国家自然科学基金项目(U1704156)
河南省高等学校青年骨干教师资助计划项目(2015GGJS-036)
关键词
晶圆制造
整体式
自动化物料搬运系统
模糊逻辑
调度
wafer fabrication
unified
automated material handling system
fuzzy logic
schedule
作者简介
吴立辉(1981-),男,湖南邵阳人,河南工业大学副教授,博士,研究方向为复杂制造系统调度,(E-mail)wulihui@haut.edu.cn;通讯作者:宋昊举(1993-),男,河南安阳人,河南工业大学硕士研究生,研究方向为晶圆制造AMHS调度,(E-mail)s15517581923@163.com。
