摘要
As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
基金
Supported by National Natural Science Foundation of China(Grant No.51275307)
作者简介
Cong PAN, born in 1990, received his master degree from Shanghai Jiao Tong University, China, in 2016, and his bachelor degree from Huazhong University of Science and Technology, China, in 2012. His research interests include modeling, scheduling and control of complex manufacturing systems. E-mail： pan_c0123@sjtu.edu.cn.Jie ZItANG, born in 1963, is currently a professor at School of Mechanical Engineering, Shanghai Jiao Tong University, China. She received her PhD in mechanical engineering from Nanjing University of Aeronautics ＆ Astronautics, China, in 1997, her BS and MS degrees from Jiangsu University of Science ＆ Technology, China in 1984 and 1991, respectively. Her current research interests are intelligent manufacturing, big data technologies, the industrial internet and modeling, scheduling and control of complex manufac- turing systems. E-mail： zhangjie@sjtu.edu.cn.Wei QIN, born in 1982, is currently a lecturer at School of Mechanical Engineering, Shanghai Jiao Tong University, China. He received his BS degree from Shanghai Jiao Tong University, China, in 2004 and the MS degree from Tsinghua University, China, in 2006. In 2011, he received his PhD degree from University of Hong Kong. His current research interests are production planning and control, big data technologies, and intelligent manufacturing. E-mail： wqin@sjtu.edu.cn.
